2012
DOI: 10.1063/1.4770073
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Effects of the oxygen vacancy concentration in InGaZnO-based resistance random access memory

Abstract: Resistance random access memory (RRAM) composed of stacked aluminum (Al)/InGaZnO(IGZO)/Al is investigated with different gallium concentrations. The stoichiometric ratio (x) of gallium in the InGaxZnO is varied from 0 to 4 for intentional control of the concentration of the oxygen vacancies (VO), which influences the electrical characteristics of the RRAM. No Ga in the IGZO (x = 0) significantly increases the value of VO and leads to a breakdown of the IGZO. In contrast, a high Ga concentration (x = 4) suppres… Show more

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Cited by 61 publications
(50 citation statements)
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“…At this low voltage region, the trap sites of the Cs 3 Bi 2 I 9 are partially filled due to the weak injection of electrons and thus the Ohmic behavior is observed. As shown in Figure c, with the voltage increases, the current suddenly rises with a relationship of I ∝ V 2 , which fits well with the classical trap‐controlled SCLC mechanism described by Equation J = 98 nεμV2d3…”
supporting
confidence: 77%
“…At this low voltage region, the trap sites of the Cs 3 Bi 2 I 9 are partially filled due to the weak injection of electrons and thus the Ohmic behavior is observed. As shown in Figure c, with the voltage increases, the current suddenly rises with a relationship of I ∝ V 2 , which fits well with the classical trap‐controlled SCLC mechanism described by Equation J = 98 nεμV2d3…”
supporting
confidence: 77%
“…Apparently, this a-IGZO film with high electron concentration is not suitable for TFT applications. The electrons in the a-IGZO layer are mainly caused by oxygen vacancies (V O ) [63][64][65]. The insufficient oxygen content in the chamber during the deposition process would lead to abundant V O and leads to excess electrons.…”
Section: Bmentioning
confidence: 99%
“…Additionally, because the conductivity of MO semiconductors can be affected by electron–hole pairs generated by photo‐irradiation and charge trapping/detrapping induced by chemisorbed molecules, MO semiconductors are promising sensing materials for photodetectors, gas sensors, and biochemical sensors . Furthermore, MO‐based resistive random access memories (RRAMs) have garnered much attention in recent years because of their low power consumption and high speed . The memory effect was explained by oxygen ion migration in the MOs, which strongly relies on the concentration of oxygen vacancies in the MOs.…”
Section: Introductionmentioning
confidence: 99%