2016
DOI: 10.7567/jjap.55.06je01
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Effects of the Mo composition of Mo-alloyed Yb/Si contacts on the microstructures and electrical properties

Abstract: In this study, we investigate the effects of the Mo composition of Mo-alloyed Yb/Si contacts on the microstructures during silicidation and the electrical properties of the contacts. We co-sputter Mo and Yb to produce Mo-alloyed Yb films with different Mo compositions (5, 20, 40, and 50 at. %) and anneal them at elevated temperatures (500–700 °C). Our material characterization elucidates a series of material reactions, including solid-state amorphization and the nucleation and growth of epitaxial YbSi2− … Show more

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