2014
DOI: 10.1002/app.41394
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Effects of the film thickness on the morphology, structure, and crystal orientation behavior of poly(chloro‐p‐xylylene) films

Abstract: Poly(chloro-p-xylylene) (PPXC) films with a thickness range encompassing more than three orders of magnitude (from 10 2 nm to 10 2 lm) were prepared on Si substrates by the chemical vapor deposition method under the same conditions. The effect of the film thickness (d) on the morphology, crystal structure, and crystal orientation behavior of the PPXC films was studied. The average roughness of the root mean square (rms) of the films increased with increasing d according to a power law (rms d b , where b is an … Show more

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Cited by 2 publications
(1 citation statement)
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“…Under the conditions chosen in this work PPX is formed in a semi-crystalline structure with grain boundaries between microcrystalline regions [17,22,23]. Depending on details of the formation process and on the thickness of the film formed some of the grain boundaries may reach through the entire film allowing for non-intermittent pathways (NIPs) for ion transport.…”
Section: Introductionmentioning
confidence: 99%
“…Under the conditions chosen in this work PPX is formed in a semi-crystalline structure with grain boundaries between microcrystalline regions [17,22,23]. Depending on details of the formation process and on the thickness of the film formed some of the grain boundaries may reach through the entire film allowing for non-intermittent pathways (NIPs) for ion transport.…”
Section: Introductionmentioning
confidence: 99%