2011
DOI: 10.1016/j.apsusc.2011.04.014
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Effects of substrate temperature on the structure and mechanical properties of (TiVCrZrHf)N coatings

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Cited by 113 publications
(42 citation statements)
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“…At 80°C, due to low surface mobility, the coating morphology develops as tapered crystallites from a reduced number of nucleation sites, resulting small grain size values, specific for the MPE coatings [48]. With increasing temperature at 300°C, the surface diffusion and adatom mobility also increase, leading to an enhanced aggregation of crystallites [2,6,49,50], more evident for series-1 coatings. For this series, the coatings deposited at higher temperatures than 300°C showed a continuously decrease of the grain size, partially as a result of changes in grain growth kinetics [48,51].…”
Section: Phase Composition and Crystalline Structurementioning
confidence: 94%
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“…At 80°C, due to low surface mobility, the coating morphology develops as tapered crystallites from a reduced number of nucleation sites, resulting small grain size values, specific for the MPE coatings [48]. With increasing temperature at 300°C, the surface diffusion and adatom mobility also increase, leading to an enhanced aggregation of crystallites [2,6,49,50], more evident for series-1 coatings. For this series, the coatings deposited at higher temperatures than 300°C showed a continuously decrease of the grain size, partially as a result of changes in grain growth kinetics [48,51].…”
Section: Phase Composition and Crystalline Structurementioning
confidence: 94%
“…Various nitride MPE films were investigated so far, e.g. [1][2][3][4][5][6][7], but less attention was given to carbides [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
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“…In recent years, HEA films have been widely studied, such as TiVCrZrHf film 5 , AlCrMoTaTiZr film 6,7 , etc. Moreover, HEA coatings have been proposed for the potential applications as protective films [8][9][10] , wear-resistant materials 11 , corrosion-resistant materials 12 , and coatings in communication devices 13 .…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the properties of multicomponent coatings, sometimes called "highly entropic" coatings, have been extensively studied. In particular, the following coatings were investigated (Ti,V,Cr,Zr,Hf)N [15,16], (Al,Cr,Ta,Ti,Zr)N [17], (Al,Cr,Nb,Si,Ti,V)N [18], and (Zr,Nb,Cr,Al)N [19]. In these studies, it was shown that the addition of alloying elements (in particular, Nb, Cr, Nf, Ta) to the Zr-N, Al-N or Ti-N nitride systems reduces the average cavitation velocity and abrasive wear of the coatings.…”
Section: Introductionmentioning
confidence: 99%