Effects of Specimen Dimensions on Adhesive Shear Strength between a Microsized SU-8 Column and a Silicon Substrate

Abstract

A method for studying the structure and thermodynamic properties of interfaces between coexisting fluid phases has been developed recently. The density functional approach employs correlation functions calculated from reference hypernetted-chain integral equations. We report here results for liquid-liquid interfaces: the interface of a symmetrical binary Lennard-Jones mixture, a mixture of particles with different sizes and a polar-nonpolar liquid interface. Also model potentials for argon, CHF 3 , C 6 H 12 and H 2 O are tested with respect to surface properties.

Opto-Acoustic Method for the Characterization of Thin-Film Adhesion

“…Table 4 compares the valley frequency of the Ti specimen discussed above and the hypothetical resonant frequency calculated from the elastic constant found in the polystyrene specimen (Table 1) along with the interfacial elastic constant reported by Noijen et al [2] and Ishiyama et al [24]. Here, the hypothetical resonant frequency is calculated under the assumption that a 75 nm-thick, 5 mm × 5 mm Ti film is coated on the respective substrate.…”

“…Noijen et al [2] measured the interfacial elastic constant for a copper thin-film using the four-point bending test. Ishiyama et al [24] measured the elastic constant of a columnar photoresist adhered to a silicon substrate. Table 4 indicates that the resonant frequencies observed in this study are of the same order of magnitude as the Noijen's four-point bending test.…”