2012
DOI: 10.1007/s10854-012-0906-3
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Effects of RF magnetron sputtering power density on NTC characteristics of Mn–Co–Ni thin films

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Cited by 15 publications
(3 citation statements)
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“…[3][4][5] Mn-spinel oxides are fabricated using a solid-state reaction and sintering above 1300 1C for chip thermistors, 6 and by chemical solution deposition, sputtering, screen printing, and molecular beam epitaxy at 700-1200 1C (including post-annealing) for thin film thermistors. [7][8][9][10][11] Thus, Mn-spinel oxide thermistors require high temperatures to produce sufficient ceramic quality and good temperature detection properties.…”
Section: Introductionmentioning
confidence: 99%
“…[3][4][5] Mn-spinel oxides are fabricated using a solid-state reaction and sintering above 1300 1C for chip thermistors, 6 and by chemical solution deposition, sputtering, screen printing, and molecular beam epitaxy at 700-1200 1C (including post-annealing) for thin film thermistors. [7][8][9][10][11] Thus, Mn-spinel oxide thermistors require high temperatures to produce sufficient ceramic quality and good temperature detection properties.…”
Section: Introductionmentioning
confidence: 99%
“…The temperature sensor is one of the sensors to detect symptoms of temperature changes in specific dimensions with a thermistor [17]. One often used thermistor is the negative temperature-coefficient (NTC), with good sensitivity and response [18]. Most of the NTC materials are solid solutions of transition metal oxides, such as NiO, Mn3O4, and Co3O4, with spinel-type crystal structures often exhibiting poor stability and reproducibility due to high porosity and incomplete intergranular contact [19].…”
mentioning
confidence: 99%
“…Published August 7, 2018. Manganese-based spinel oxide, a typical negative temperature coefficient (NTC, resistance exponentially decreases as temperature increases) material, is widely used for thermal sensitive devices fabrication, such as thermistors, due to the corresponding excellent sensitivity to minute temperature changes or for the display of outstanding B values. [1][2][3][4][5][6][7] To the authors' knowledge, the addition of zinc to Mnbased spinel oxide can contribute to the resistance stability improvement of the material, [8][9][10] although the Zn cation mechanism for the spinel lattice stabilization is still not clear. Conflicting opinions exist: certain authors claimed that Zn ions in Ni 0.6 Cu 0.5 Zn x Mn 1.9-x O 4 , Ni 0.5 Cu x Zn 1.0 Mn 1.5-x O 4 , Ni 0.66 Cu 0.2 Zn x Mn 2.14-x O 4 , and Ni 1−x Zn x Fe 2 O 4 ceramics prefer to occupy A sites (tetragonal sites), [10][11][12][13] where the Zn 2+ has shorter radius (0.058 nm) compared to Mn 2+ (0.066 nm); 14 other authors asserted that a small amount of Zn 2+ ions tend to be placed on the B sites (octahedral sites) in Ni 0.45 Cu 0.45 Co 0.15 Zn x Mn 1.95−x O 4 ceramic, while an equivalent proportion of Mn 3+ /Mn 4+ cations is created on the sites, in order to maintain an electrical charge neutrality.…”
mentioning
confidence: 99%