Effects of residual stress on the mechanical and structural properties of TiC thin films grown by RF sputtering

Mani, Abderahim; Aubert, P.; Mercier, Florence; Khodja, H.; Berthier, C.; Houdy, Ph.

doi:10.1016/j.surfcoat.2004.06.017

Cited by 98 publications

(61 citation statements)

References 26 publications

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“…In the nanocomposite C 1s spectrum, an additional shoulder is observed at about ϳ283 eV binding energy between the C-C and Ti-C peaks, which we denote C-Ti ‫ء‬ . 3,7,[11][12][13][14][15][16] The intensity of this additional feature increases upon sputter etching. 17 However, recent studies with high-energy XPS have shown that it is present also in unsputtered samples.…”

Section: Introductionmentioning

confidence: 99%

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

et al. 2009

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The electronic structure of nanocrystalline ͑nc-͒ TiC/amorphous C nanocomposites has been investigated by soft x-ray absorption and emission spectroscopy. The measured spectra at the Ti 2p and C 1s thresholds of the nanocomposites are compared to those of Ti metal and amorphous C. The corresponding intensities of the electronic states for the valence and conduction bands in the nanocomposites are shown to strongly depend on the TiC carbide grain size. An increased charge transfer between the Ti 3d-e g states and the C 2p states has been identified as the grain size decreases, causing an increased ionicity of the TiC nanocrystallites. It is suggested that the charge transfer occurs at the interface between the nanocrystalline-TiC and the amorphous-C matrix and represents an interface bonding which may be essential for the understanding of the properties of nc-TiC/amorphous C and similar nanocomposites.

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Section: Introductionmentioning

confidence: 99%

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

et al. 2009

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“…The most important property for surface hard coating is hardness, which is usually determined by indentation hardness tests at low test forces. Recently, the hardness of thin coating films of cutting tools has been measured by the nanoindentation method at considerably low test forces, e.g., 10 mN for a TiC coating 1) and 2 mN for a B 4 C coating.…”

Section: Introductionmentioning

confidence: 99%

Indentation Size Effect for the Hardness of Refractory Carbides

Nino

Tanaka

Sugiyama³

et al. 2010

Mater. Trans.

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This study measured the Vickers hardness of the sintered refractory carbides B 4 C, Mo 2 C, NbC, TiC, V 8 C 7 , W 2 C, WC, WC-SiC, and ZrC over a wide range of test forces between 0.49 and 196 N. The results showed an indentation size effect (ISE), with hardness values that increased with decreasing test force for the carbides. The test force dependence of the hardness was analyzed by the proportional specimen resistance (PSR) model. The value of the a 1 term that reflects the elastic resistance in the model was obtained for the carbides and compared with their measured elastic, shear, and bulk moduli. It was not clear what type of modulus related strongly to the a 1 term. There was a strict correlation between the hardness at an infinite test force and at a test force of 9.8 N. However, the hardness at a test force of 0.49 N a little poorly reflected the hardness at an infinite test force.

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“…But at a smaller scale, such as the AFM scanning area, the relatively constant angles between the parallel cracks and the interface indicate the local orientation of the TiC interlayer is mainly determined by the texture of Ti substrate and should follow the mechanism proposed above. The control of TiC ͑111͒ orientation has been achieved on Si ͑001͒ substrate, as demonstrated by Mani et al 26 …”

Section: Microcracks Tougheningmentioning

confidence: 99%

Enhance diamond coating adhesion by oriented interlayer microcracking

Guo

Xiao

et al. 2009

Journal of Applied Physics

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In this paper, we report a microcrack toughening mechanism for enhancing the adhesion of diamond coating. The oriented microcracks were formed within the TiC interlayer to dissipate strain energy and accommodate deformation via the crack opening-closing mechanism, thus enhancing the coating/substrate interfacial toughness. The delamination of diamond coating was effectively prevented when the parallel microcracks were confined within the interlayer and arrested at interfaces of coating/interlayer/substrate. Density functional theory calculations revealed that the highly anisotropic fracture strength of the TiC phase energetically favors crack initiation and propagation along (100) planes only, which are 54.7° away from the interface. These microcracks are constrained inside the interlayer by the two strong interfaces in the substrate/interlayer/coating system. The new microcrack toughening mechanism with these combined features has a wide application to enhance the adhesion of thin-film coatings.

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Effects of residual stress on the mechanical and structural properties of TiC thin films grown by RF sputtering

Cited by 98 publications

References 26 publications

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

Indentation Size Effect for the Hardness of Refractory Carbides

Enhance diamond coating adhesion by oriented interlayer microcracking

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