Effects of Pretreatments on Deposition Rate of Films in Aerosol Deposition Method

Abstract

In the aerosol deposition method (ADM), we investigated an influence of pre-treatments for barium titanate powders as raw material on the deposition rate of thick films. By sieving and drying the powder, deposition rate of the films fabricated by ADM was effectively enhanced. On the other hand, heating the powders at 400-800°C, the resulting powders caused low deposition rate of the films. When a planetary milling was performed prior to charge aerosol chamber, the deposition rate of the films was four times higher than that in deposition using the powder without milling. By changing the milling rotation rate, we control size of agglomerated particles consisting of powders, which results in the control of deposition rate of the films.

Powder requirements for aerosol deposition of alumina films

“…As a standard preparation for AD, each alumina powder was wet ground for 4 h in a high energy planetary ball mill [35]. Milling was conducted using zirconia media and cyclohexane as the liquid vehicle, followed by the removal of the solvent by a rotary evaporator.…”

Powder Pre-Treatment for Aerosol Deposition of Tin Dioxide Coatings for Gas Sensors

“…By milling the powder and crushing larger particles, film formation and growth became possible. The positive effect of milling treatment on the deposition rate has been shown already in the literature [12,13]. It is thought to originate from pre-cracking of the particles and the formation of lattice defects that might support film formation through the reduction of the fracture energy.…”

“…In most cases, it is characterized by the particle size and distribution of starting powder particles [1,4,8,9,10]. There are several publications about powder pre-treatment to improve deposition onto dense and mechanically stable films [11,12,13]. However, AD seems to work well only for particle sizes of approximately 200 nm up to 2 µm.…”

Aerosol Codeposition of Ceramics: Mixtures of Bi2O3–TiO2 and Bi2O3–V2O5

“…Each raw oxide powder was ground alone for 4 h in a planetary ball mill using cyclohexane as milling fluid and then dried to enhance the deposition rate and the suitability for AD. 24 Then, stoichiometric amounts of metal oxides according to compositions Bi 4 Ti 3 O 12 and Bi 4 V 2 O 11Àd were weighed out and mixed in the planetary ball mill once again for 1 h. This short-time milling was used to obtain a homogeneous mixture while avoiding a mechanochemical synthesis. 25,26 Single-phase Bi 2 O 3 powder was also sprayed for comparison.…”