Effects of oxygen and nitrogen addition on the optical properties of diamond-like carbon films

Hwang, Min-Sun; Lee, Chongmu

doi:10.1016/s0921-5107(00)00381-0

Cited by 40 publications

(10 citation statements)

References 13 publications

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“…According to the increase in doping N into the film, at first, the C-N and C=N bonds increase, then the C-N and C=N bonds decrease and the C"N bonds increase. The C"N bonds have higher bond energy than the C-N and (Hwang and Lee 2000;Cuong et al 2005), therefore, the CHxNy film is more stable, and the bonded fraction decreases with the increase in the N concentration as shown in Fig. 5.…”

Section: Methodsmentioning

confidence: 92%

Vacuum vapor deposition of PFPE molecules on CHxNy and CHxFy amorphous carbon surfaces

2007

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According to the demand of increasing storage density for the magnetic data storage, a contact recording system is proposed, in which the head constantly makes contact with the disk surface during read/write cycles. In this system a stronger lubricant film for head disk interface (HDI) is required. In a conventional dip-coating method, which is carried out under atmospheric conditions, however, a fresh diamond like carbon (DLC) surface adsorbs several contaminations from the air and a strong lubricant layer is difficult to form on the DLC surface. In this study, a DLC layer is coated on a Si substrate by a plasma chemical vapor deposition (PCVD) method, then the DLCcoated Si sample is transferred to another vacuum chamber without being exposed to the atmosphere, and a perfluoropolyether (PFPE) lubricant film is vapor-deposited on the sample. The sample is analyzed by XPS and compared to the surface on which the PFPE lubricant is dip-coated. It is noted that both samples are rinsed after the coatings and the loose PFPE molecules are washed away. A thicker bonded layer of PFPE is formed on the DLC surface treated by vapor deposition. A tribological wear test is also carried out using a pin-on-disk tribotester. Both results show that the tribological characteristics are improved by the vapor deposition of PFPE molecules compared to the dip-coating method.

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Section: Methodsmentioning

confidence: 92%

Vacuum vapor deposition of PFPE molecules on CHxNy and CHxFy amorphous carbon surfaces

2007

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“…The nitrogen content of the DLN films decreases continuously from 27.8 μl/min to 80.6 μl/min and then increases rapidly from 80.6 μl/min to 149.5 μl/min flow rate. The increase of nitrogen content into the film can decrease the hardness, 22 but increase the silicon and oxygen content into the films can increase the hardness of the films. 44,45 …”

Section: B Structural Propertiesmentioning

confidence: 99%

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

et al. 2012

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Diamond-like nanocomposite (DLN) thin films were deposited on pyrex glass substrate using different flow rate of haxamethyldisiloxane (HMDSO) based liquid precursor with nitrogen gas as a glow discharged decomposition by plasma enhanced chemical vapor deposition (PECVD) technique. The significant influence of different precursor flow rates on refractive index and thickness of the DLN films was measured by using spectroscopic filmatrics and DEKTAK profilometer. Optical transparency of the DLN thin films was analyzed by UV-VIS-NIR spectrometer. FTIR spectroscopy, provides the information about shifted bonds like SiC2, Si-C, Si-O, C-C, Si-H, C-H, N-H, and O-H with different precursor flow rate. We have estimated the hardness of the DLN films from Raman spectroscopy using Gaussian deconvolution method and tried to investigate the correlation between hardness, refractive index and thickness of the films with different precursor flow rates. The composition and surface morphology of the DLN films were investigated by X-ray photo electron spectroscopy (XPS) and atomic force microscopy (AFM) respectively. We have analyzed the hardness by intensity ratio (ID/IG) of D and G peaks and correlates with hardness measurement by nanoindentation test where hardness increases from 27.8 μl/min to 80.6μl/min and then decreases with increase of flow rate from 80.6μl/min to 149.5μl/min. Finally, we correlates different parameters of structural, optical and tribological properties like film-thickness, refractive index, light transmission, hardness, surface roughness, modulus of elasticity, contact angle etc. with different precursor flow rates of DLN films

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“…Added nitrogen causes increased film hydrophilicity and roughness [4] and thus better cell adhesion and biocompatibility [4,5]. The hardness of the film decreases with the addition of nitrogen [6], and the optical properties of the film [7,8] as well as the electrical properties [7,9] are changed. With its changed electrochemical characteristics, nitrogen containing DLC (N-DLC) films are considered to be promising electrode material for electrochemical analysis [10].…”

Section: Introductionmentioning

confidence: 99%

Modification of diamond-like carbon films by nitrogen incorporation via plasma immersion ion implantation

Flege

Hatada

Hoefling

et al. 2015

Nuclear Instruments and Methods in Physics Research Section B:

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Effects of oxygen and nitrogen addition on the optical properties of diamond-like carbon films

Cited by 40 publications

References 13 publications

Vacuum vapor deposition of PFPE molecules on CHxNy and CHxFy amorphous carbon surfaces

Vacuum vapor deposition of PFPE molecules on CHxNy and CHxFy amorphous carbon surfaces

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

Modification of diamond-like carbon films by nitrogen incorporation via plasma immersion ion implantation

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