2009
DOI: 10.1016/j.sab.2009.10.003
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Effects of oxygen addition to argon glow discharges: A hybrid Monte Carlo-fluid modeling investigation

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Cited by 61 publications
(43 citation statements)
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“…In addition to electrons, oxygen plasma generates many reactive species, such as reactive oxygen, atomic oxygen (O), ozone (O 3 ), superoxide anion (•O 2 − ), peroxide (•O 2 −2 ). After interaction with hydrogen atoms, hydrogen peroxide (H 2 O 2 ), hydroxyl radical (•OH) and hydroxyl ion (OH − ) can also be formed [ 81 , 82 ]. These reactive species can react with HMDSO fragments, as well as with the formed hydrocarbons.…”
Section: Resultsmentioning
confidence: 99%
“…In addition to electrons, oxygen plasma generates many reactive species, such as reactive oxygen, atomic oxygen (O), ozone (O 3 ), superoxide anion (•O 2 − ), peroxide (•O 2 −2 ). After interaction with hydrogen atoms, hydrogen peroxide (H 2 O 2 ), hydroxyl radical (•OH) and hydroxyl ion (OH − ) can also be formed [ 81 , 82 ]. These reactive species can react with HMDSO fragments, as well as with the formed hydrocarbons.…”
Section: Resultsmentioning
confidence: 99%
“…and, consequently, promote further chemical reactions in the afterglow/deposition zone. An interaction of high energy photons with deposited film can (i) reduce the deposition rate by the resputtering process, (ii) cause a loss of non‐fouling film properties or (iii) modify the surface of the film by increasing the degree of cross‐linking 22–30. Last but not least, interaction of Ar( 3 P 0 ) and Ar( 3 P 2 ) metastable species carrying more than 11 eV with polymer film surface should be considered.…”
Section: Discussionmentioning
confidence: 99%
“…[34][35][36] Therefore, the characteristic decay time of the metastable Ar m * can be estimated to also be less than 1 ls. This species is quickly converted to the excited Ar 2 * through three-body collisions.…”
Section: Excited Oh * and Ar M * Speciesmentioning
confidence: 99%