2011
DOI: 10.1016/j.jallcom.2010.10.037
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Effects of oxygen addition on physical properties of ZnO thin film grown by radio frequency reactive magnetron sputtering

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Cited by 65 publications
(23 citation statements)
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“…Until today, there has been a prevailing need for efficient, low temperature and lowcost deposition methods for thin films as technological industrial applications. Over the past few years, many methods such as magnetron sputtering [13], chemical vapour deposition [14], pulsed laser deposition [6], spray pyrolysis [15], sol-gel [5], electrodeposition [11] and hydrothermal [16] have been employed to synthesize nanostructured ZnO thin films.…”
Section: Introductionmentioning
confidence: 99%
“…Until today, there has been a prevailing need for efficient, low temperature and lowcost deposition methods for thin films as technological industrial applications. Over the past few years, many methods such as magnetron sputtering [13], chemical vapour deposition [14], pulsed laser deposition [6], spray pyrolysis [15], sol-gel [5], electrodeposition [11] and hydrothermal [16] have been employed to synthesize nanostructured ZnO thin films.…”
Section: Introductionmentioning
confidence: 99%
“…Ukuran butir semakin besar dengan morfologi permukaan kasar pada annealing dengan tekanan oksigen 50 mTorr yang diamati pada Gambar 1(b). Hasil tersebut sesuai dengan laporan Hsu et al [13], tekstur film seharusnya berbeda ketika diberi perlakuan variasi tekanan oksigen, ukuran butir meningkat pada tekanan oksigen tertentu. Berdasarkan laporan Chen et al [14], film tipis ZnO yang diberi oksigen pada proses annealing memiliki kristal yang lebih baik.…”
Section: Hasil Dan Pembahasanunclassified
“…It is essential to ensure that both sides of the interface slabs used in calculations are thick enough to exhibit bulk-like interiors, as it is known that the binding property of thin film can differ significantly from that of thicker one [32,33]. Actually, the surface slab with more atom-layers will obtain more accurate calculation result, but the computation will need more memory hardware and longer computing time.…”
Section: Surface Propertiesmentioning
confidence: 99%