Effects of N/Si ratio on mechanical properties of amorphous silicon nitride coating
Huasi Zhou,
Cecilia Persson,
Wei Xia
et al.
Abstract:The utilization of silicon nitride coatings has been proposed as an effective method to enhance wear resistance and mitigate the release of metallic ions from biomedical implants. However, the relatively high dissolution rate of low-density coatings remains an obstacle to their implementation. Here, chemical vapour deposition techniques may have advantages over the typically used physical vapour deposition (PVD) methods. Therefore, in this study, silicon nitride coatings were obtained by low-pressure chemical … Show more
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