A novel preparation method to obtain a defect-diminished fatty acid crystalline monolayer, that is, a multistep creep method, was proposed on the basis of area-creep mechanisms of the monolayer on the water surface. The fatty acid monolayer prepared by the multistep creep method was morphologically homogeneous and mechanically stable even at a high surface pressure, while the monolayer prepared by a conventional continuous compression method without an area-creep process was easily collapsed. The crystallographical regularity of the crystalline monolayer prepared by the multistep creep method was remarkably progressed compared with that of the monolayer prepared by the continuous compression method. Therefore, the multistep creep method is applicable for the construction of the defect-diminished monolayer.