Effects of mid-spatial frequency errors of optical surface on the penumbra width of photolithography relay lens

Liu, Jiahong; Zhang, Fang; Huang, Huijie

doi:10.1117/12.3008049

AOPC 2023: Optical Design and Manufacturing 2023

DOI: 10.1117/12.3008049

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Effects of mid-spatial frequency errors of optical surface on the penumbra width of photolithography relay lens

Jiahong Liu,

Fang Zhang,

Huijie Huang

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Effects of mid-spatial frequency errors of optical surface on the penumbra width of photolithography relay lens

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References 7 publications

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