“…The applications of ZnO include solar cells, light-emitting diodes (LEDs), gas sensors, and thin-film transistors (TFTs) [ 1 , 2 , 3 , 4 , 5 ]. ZnO film can be prepared by several techniques, such as pulsed laser deposition (PLD), sputtering, chemical vapor deposition (CVD), solution-based methods, atomic layer deposition (ALD), and molecular beam epitaxy (MBE) [ 6 , 7 , 8 , 9 , 10 , 11 ]. Among these techniques, ALD is distinguished for the self-limiting surface reaction between the precursors which is confined to the substrate surface.…”