Effects of laser parameters on machining precision and quality of wave-permeable materials

Zhang, Lin; Yang, Zhen; Fang, Zheng; Cheng, Jue

doi:10.2351/7.0000402

Cited by 3 publications

(2 citation statements)

References 32 publications

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“…E-mail addresses: shantianzi@126.com (X. Liu), zhou_licheng@126.com(L.Zhou) a88883939@163.com(Y. Zhou), xiongyq@hotmail.com (Y. Xiong), wangjizhou80@163.com(J.Wang), 1652678844@qq.com (W. Liu) used integration of structure and function. It is normally composed of a non-metallic substrate and a metal film with a special periodic pattern on the substrate, which is mainly processed by laser etching [2][3][4] . Yung studied the laser etching processes of Ti films on Ni-Cu metal/ceramic and glass substrates and found that nondestructive metal film removal can be achieved by adjusting the laser parameters [5] .…”

Section: Introductionmentioning

confidence: 99%

Thermodynamic effects of pulsed laser multilayer thin film etching

liu

Zhou

Liu

et al. 2023

Third Optics Frontier Conference (OFS 2023)

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The impact of the interface effect on the etching accuracy of a non-single-layer structure was utilized as a starting point in this work to analyze the correlation between the integrated structure's film surface/interface temperature field, stress field distribution, and interface mutation. Based on single-factor etching experiments, the relationship between the temperature field, stress field, and laser characteristic parameters was evaluated via a combination of theoretical analysis and numerical simulation. For polyimide-based metal aluminum film, a connection between scanning speed and etching characteristic parameters was discovered. The results illustrate that when Al/PI (aluminum film thickness of 2μm) was irradiated by a laser, the interface temperature reached a certain value, which caused distortion of the film and substrate. Changes in the distribution of the temperature and stress fields of the film affect the heat transfer in the system and thus affect the thermodynamic trajectory, thermal feedback, etching rate, and shape of the target film surface.Ultimately, the etching and removal of the Al/PI integration of the non-single-layer structure are attributed to the interplay of thermal and stress field effects.

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Section: Introductionmentioning

confidence: 99%

Thermodynamic effects of pulsed laser multilayer thin film etching

liu

Zhou

Liu

et al. 2023

Third Optics Frontier Conference (OFS 2023)

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“…Precision machining has high requirements for raw materials, equipment, tools, environment, quality supervision, and other aspects. Now we have already known that the unsatisfactory precision of work pieces and the machining error during precision machining are mainly caused by the process system and the internal stress, and thermal error and geometric error are the most common error types [5][6][7][8][9][10]. The machining error caused by the thermal deformation of machines or tools accounts for half or even more in the total error, so the thermal error has become the primary error source of precision machining.…”

Section: Introductionmentioning

confidence: 99%

Thermal Property Analysis of Precision Machinery and Its Thermal Error Compensation

Li¹

2022

IJHT

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The machining error caused by the thermal deformation of machines or tools accounts for half or even more in the total error, and the machining precision could be improved by stabilizing the heat balance of the process system. However, few of the existing studies have concerned about the thermal deformation law caused by the high-speed self-feed spindle system that could meet the performance requirements of high-speed cutting in precision machining, therefore, it’s of great necessity to study the thermal properties of precision machinery. For this reason, this paper took the precision machinery with a high-speed self-feed spindle system as the subject to study its thermal properties and thermal error compensation. At first, this paper introduced the composition of the precision machining control system and analyzed the thermal properties of the subject. Then, the heat source and heat exchange forms of the precision machinery were analyzed, the thermal intensity of the internal and external heat sources during the machining process was calculated, and the corresponding thermal boundary conditions were given. After that, this paper divided the heat sources of the subject during high-speed cutting into two types: internal heat source and external environment heat source, and carried out analysis. Moreover, this paper gave the structure of a thermal error and temperature synchronous measurement system for precision machinery, integrated the features of the thermal error data of two groups of high-speed cutting process, and built a thermal error compensation model based on the Bayesian network. At last, experimental results verified the effectiveness of the model.

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Influence of the transition layer material on the etched pattern of multilayer films

Liu

Wang³

et al. 2023

Journal of Laser Applications

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High-quality frequency-selective surfaces (FSSs) exert a crucial role in the absorption and filtration of electromagnetic signals. FSS is made from structure-function-integrated materials with a patterned metal layer cover. Cr or Ni transition layers are usually arranged between the material substrate and the metal layer to enhance their bonding. However, the study on the removal behavior of Al/glass and Al/Ni/glass films by laser ablation with a pulse width of 100 ns of the 1064 nm laser found that the Ni transition layer increases the damage threshold of Al films because its thermophysical parameters changed the laser absorption rate of the Al surface and the spatial temperature distribution inside the Al film. The experimental results show that four characterized areas in the laser ablation surface are identified in the machined grooves when the laser energy density is 12 J/cm2, indicating that the multilayer films are mainly removed by vaporization, phase explosion, melting, and fragmentation. It is found that the removal mechanism of the Al/Ni/glass system is dominated by melting heat stress and fragmentation, so splashing is obvious and results in residual recondensation droplets of micrometer size. The above results provide ideas and methods for other high-quality laser processing of structure-function-integrated film systems.

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Effects of laser parameters on machining precision and quality of wave-permeable materials

Cited by 3 publications

References 32 publications

Thermodynamic effects of pulsed laser multilayer thin film etching

Thermodynamic effects of pulsed laser multilayer thin film etching

Thermal Property Analysis of Precision Machinery and Its Thermal Error Compensation

Influence of the transition layer material on the etched pattern of multilayer films

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