We report effects of oxygen plasma treatment on the surface functionalization of WO 3 thin films with (3-aminopropyl)triethoxysilane (APTES) and succinic anhydride (SA). X-ray diffraction and x-ray photoelectron spectroscopy results indicate the existence of the WO 3 phase. Fourier transform infrared spectroscopy measurement shows clear bands at 1040 cm À1 (Si-O-Si), 1556 cm À1 (N-H), 1655 cm À1 (C=O), 2937 cm À1 (C-H) and 3298 cm À1 (N-H), confirming the surface functionalization efficiency enhanced by prior treatment of oxygen plasma. It thus follows that the prior oxygen plasma treatment activates hydroxylation with more -OH groups on the WO 3 surface, which can pave a highly efficient way to the surface functionalization by APTES and SA.