Effects of interfacial depletion on the degradation of SiAlN coating

Gao, Zhaohe; Kulczyk-Malecka, Justyna; Kelly, Peter; Xiao, Ping

doi:10.1016/j.apsusc.2022.155576

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2023

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“…coatings display good intrinsic thermal stability due to their high activation energy and extremely low parabolic rate constant of oxidation [11,17]. However, the degradation of SiMeN is determined by the interfacial diffusion/reaction with the underlying substrate as the interdiffusion/inter-reaction could alter the microstructure and chemical composition of the top amorphous SiMeN coating, or cause the depletion of the remnant SiMeN coating [11,17,20].…”

Section: Resultsmentioning

confidence: 99%