1988
DOI: 10.1021/ac00158a022
|View full text |Cite
|
Sign up to set email alerts
|

Effects of helium addition to an argon glow discharge plasma on emission lines of sputtered particles

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
14
0

Year Published

1990
1990
2017
2017

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 46 publications
(15 citation statements)
references
References 47 publications
0
14
0
Order By: Relevance
“…Previous studies reported on a reduction in the sputtering rate caused by He addition to an Ar glow discharge plasma. 16,17 The intensity change of the Fe I line seems to correspond to the variation in the sputtering rate, because the intensity of the Fe I line having a smaller excitation energy (3.43 eV) 4 can be varied principally by the sample atom density in the plasma. However, the intensity of the As I line having a larger excitation energy becomes elevated up to a He pressure of 400 Pa even if the number of sample atoms ejected into the plasma is reduced.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Previous studies reported on a reduction in the sputtering rate caused by He addition to an Ar glow discharge plasma. 16,17 The intensity change of the Fe I line seems to correspond to the variation in the sputtering rate, because the intensity of the Fe I line having a smaller excitation energy (3.43 eV) 4 can be varied principally by the sample atom density in the plasma. However, the intensity of the As I line having a larger excitation energy becomes elevated up to a He pressure of 400 Pa even if the number of sample atoms ejected into the plasma is reduced.…”
Section: Resultsmentioning
confidence: 99%
“…This is probably because the sputtering rate as well as the discharge current is reduced by adding He to the Ar glow discharge plasmas. 16 In the mixed gas plasma, the SBR is greatly improved along with increasing the discharge voltage. At higher discharge voltages, the plasma with an Ar-He mixed gas could give a better analytical performance in the As determination.…”
Section: Resultsmentioning
confidence: 99%
“…The emission intensity of iron decreases with the helium pressure added, which could be explained from a decrease in the sputtering rate caused by the addition of helium. 18,19) In fact, the sputtering rates were measured to be 1.0ϫ10 Ϫ4 g cm Ϫ2 min Ϫ1 for 530-Pa argon alone and 0.51ϫ10 Ϫ4 g cm Ϫ2 min Ϫ1 for 530-Pa argon and 530-Pa helium mixed gas. It is likely to consider that the intensities of the iron line having smaller excitation energy (3.43 eV) 6) correspond to the sample atom density in the plasma more closely.…”
Section: Resultsmentioning
confidence: 99%
“…This is probably because the sputtering rate as well as the discharge current is reduced by adding helium to argon glow discharge plasmas. 18) In the mixed gas plasma, the SBR is much improved along with increasing discharge voltage. It is expected that, at higher discharge voltages, the plasma with argon-helium mixtures gives better analytical performance in the carbon determination.…”
Section: Resultsmentioning
confidence: 99%
“…Whereas argon is usually used in conventional GD-OES, various plasma gases and their mixtures have been thus investigated as alternative plasma gases. [8][9][10][11][12][13] Their observed spectrum patterns were different from each other, in which the difference is not only in their relative intensities but in the kind of emission lines that can be excited; therefore, one should select optimum analytical lines for each plasma gas employed. We discussed the line selection of copper in GD-OES when using argon and neon as the plasma gas, indicating that different emission lines should be employed for their emission analysis.…”
Section: Introductionmentioning
confidence: 99%