Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model

Abstract

A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr (1 Torr = 1.33322×10 2 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase; the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases.

Enhancing the Properties of Photocatalysts via Nonthermal Plasma Modification: Recent Advances, Treatment Variables, Mechanisms, and Perspectives

“…The gas pressure has a strong influence on plasma dynamics. Gas pressure is positively correlated with the resulting electron density, the electron temperature, and the plasma lifetime [Figure (a-c)]. − Pressure has a strong effect on the oscillation in plasma, especially in the sheath region, and the amplitude of electron density is proportional to pressure.…”

“…(a) Evolution of electron density at different gas pressures for 6000 cycles. Reproduced with permission from ref . Copyright 2017 IOP Science.…”

“…A self-consistent fluid model was used to study the effect of gas pressure on the plasma properties through a dual-frequency Ar capacitor operated at low pressure (from 0.3 to 1.5 Torr) . It showed that as the gas pressure increased from 0.3 to 1.5 Torr, various parameters including the cycle-averaged plasma density, ion energy densities on the electrode, cycle-averaged ion current densities, ionization rate, and cycle-averaged electron temperature all increased (shown in Figure a).…”

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

“…Glow discharge plasma [1][2][3][4][5][6][7][8][9][10][11] produced by a powered DC or a RF source has various applications in industrial technologies and medical therapy. Among which, an improved discharge by the substance vapor deposition, a surface adaptation by different materials and the plasma etching.…”

Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling

“…Recently, a dualfrequency (DF) discharge plasma technology has been received extensive attention in atmospheric pressure discharge. For low pressure discharges, this technology, one RF of high frequency (HF) is much greater than that of low frequency (LF), and HF source determines the plasma density and LF source controls the ion energy [9][10][11][12][13]. For atmospheric pressure discharges, DF technology is taken to realize controlling plasma discharge parameters independently.…”