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2017
DOI: 10.1021/acsami.7b03385
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Effects of Fluorine Doping on the Electrical Performance of ZnON Thin-Film Transistors

Abstract: In this work, the effects of fluorine incorporation in high mobility zinc oxynitride (ZnON) semiconductor are studied by both theoretical calculations and experimental evaluation of thin film transistors (TFTs). From density functional theory (DFT) calculations, fluorine acts as a carrier suppressor in the ZnON matrix when it substitutes a nitrogen vacant site (V). Thin films of ZnON and ZnON:F were grown by reactively cosputtering Zn metal and ZnF targets, and their electrical, physical, and chemical characte… Show more

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Cited by 33 publications
(36 citation statements)
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“…Kim et al. [ 216 ] introduced a capacitive strain sensor fabricated from Ag nanowires embedded in a PDMS substrate in an interdigitated pattern. The sensor achieved a GF of −2.0, no hysteresis behavior up to a strain of 15% and was used to detect finger and wrist motions.…”
Section: Emerging Sensor Technologiesmentioning
confidence: 99%
“…Kim et al. [ 216 ] introduced a capacitive strain sensor fabricated from Ag nanowires embedded in a PDMS substrate in an interdigitated pattern. The sensor achieved a GF of −2.0, no hysteresis behavior up to a strain of 15% and was used to detect finger and wrist motions.…”
Section: Emerging Sensor Technologiesmentioning
confidence: 99%
“…The strain in capacitive sensors induces geometrical changes between the two electrodes, which leads to a change in capacitance. These two sensors have a simple structure [ 70–75 ] and good linearity, [ 76–78 ] respectively.…”
Section: Nanowire‐based Wearable Skin Sensory Input Interfacesmentioning
confidence: 99%
“…The flexible transparent electrodes are critical to achieve high transparency of the device. Ultrathin silver nanowire (AgNW) films, which exhibit high transparency as well as high flexibility, [ 26–28 ] were used as the flexible transparent electrodes in the sensors. AgNWs having an average diameter of ≈30 nm and an average length of ≈30 µm were spray‐coated on the surface of a thin polyimide (PI) film (Figure S6, Supporting Information).…”
Section: Figurementioning
confidence: 99%