Effects of fluorination of carbon film and annealing conditions on side leakage current and current breakdown time of SiO2/graphene/Cu/Ti/SiO2/Si specimens

Chang, Chang Shuo; Cheng, Han Che; Han, Chang Fu; Lai, Chao; Lin, Jen Fin

doi:10.1016/j.vacuum.2019.109037

Vacuum

2020

DOI: 10.1016/j.vacuum.2019.109037

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Effects of fluorination of carbon film and annealing conditions on side leakage current and current breakdown time of SiO2/graphene/Cu/Ti/SiO2/Si specimens

Chang Shuo Chang

Han Che Cheng

Chang Fu Han

et al.

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Effects of fluorination of carbon film and annealing conditions on side leakage current and current breakdown time of SiO2/graphene/Cu/Ti/SiO2/Si specimens

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References 26 publications

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