Effects of Femtosecond Laser Parameters on Hole Drilling of Silica Glass

Songling, 邢松龄 Xing; Lei, 刘磊 Liu; Guisheng, 邹贵生 Zou; Xueqian, 张学谦 Zhang; Hailin, 白海林 Bai; Zhou, Y N Zhou Y N

doi:10.3788/cjl201542.0403001

Cited by 3 publications

(1 citation statement)

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“…Actually, the ultra-short-pulse lasers were firstly adopted in processing of the glass material [2,3] , since ultrashort pulse lasers have many advantages such as high energy, short action time, and better surface morphology. Although the absorption coefficient of transparent material is usually very small in the visible or near-infrared (NIR), processing such materials using ultra-short-pulse lasers can also be realized by means of two kinds of nonlinear processes, i.e., the multi-photon ionization and the avalanche ionization damage processes [4,5] . However, the ultrashort pulse lasers have some obvious demerits such as complicacy and expensiveness.…”

Section: Introductionmentioning

confidence: 99%

Laser processing of glass plates using nanosecond lasers with three wavelengths

Yang¹,

Zhang²,

Huang

et al. 2023

AOPC 2022: Advanced Laser Technology and Applications

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In this paper, a series of experiments of drilling holes and slotting micro-channels on the 1 mm-thick BK7 or 1.1 mmthick B270 glass substrates are introduced by employing three types of Q-switched lasers with the wavelength of 1064, 355, and 266 nm. Firstly, by smearing the solution of NiSO4•6H2O on the front surface of BK7 glass plates, we successfully realized drilling holes on the glass substrates by employing a 1064 nm fundamental Nd:YAG laser. Then, we also carried out the experiments of drilling holes by utilizing a normal third-harmonic-generation (THG) 355 nm Nd:YAG laser and a 266 nm FHG (forth-harmonic-generation) laser. It can be found that the diameters of drilled holes by utilizing a 355 nm laser are larger than those by utilizing a 266 nm laser, and the holes with both two wavelengths lasers did not change a lot when the exposure time of lasers was increased from 0.5 s to 30 s. Finally, the experiments of slotting micro-channels on B270 glass plates were undertaken by utilizing both a 355 nm laser and a 266 nm laser. It has been found that the cracks around slotted micro-channels become lesser when the moving speeds are increased for both experiments. The channel widths of using the 355 nm laser are around 10 times smaller than those of using the 266 nm laser. As a conclusion, among three kinds of lasers, the 355 nm laser may be the most suitable type for the glass micro-processing with high precision in practice.

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Section: Introductionmentioning

confidence: 99%

Laser processing of glass plates using nanosecond lasers with three wavelengths

Yang¹,

Zhang²,

Huang

et al. 2023

AOPC 2022: Advanced Laser Technology and Applications

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Femtosecond laser etching of Li1.5Al0.5Ge1.5(PO4)3 glass using the Bessel beam

Liu,

Jiang,

Kotobuki

et al. 2024

Journal of Laser Applications

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Surface textured materials can exhibit enhanced properties due to their unique morphology, large surface area, and modified surface properties. The laser etching process has garnered significant attention for its capability to create textures on sample surfaces, resulting in a substantial improvement of surface properties. In this study, we investigate the application of femtosecond laser etching on solid electrolytes. To achieve this, an axicon lens is employed to transform the conventional Gaussian beam into a Bessel beam, with an extended focal depth that facilitates the laser etching process. A telescope laser system with a Bessel beam having a focal length of 2 mm is constructed based on finite element analysis. Glassy LAGP [Li1.5Al0.5Ge1.5(PO4)3] with a thickness of 2 mm is successfully etched simultaneously on both surfaces using this approach. Utilization of femtosecond laser pulses effectively prevents sample melting during the process. As predicted by finite element analysis, wider ditches are observed on the surface compared to those on the backside due to higher laser intensity at the surface region. By modifying the parameters of the telescope laser system, size and depth control can be achieved for these ditches.

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