Effects of femtosecond laser ablation on Vitrovac 6025X

Tan, Ling; Seet, H.L.; Hong, Minghui; Li, X.P.

doi:10.1016/j.jmatprotec.2008.10.052

Cited by 3 publications

(3 citation statements)

References 9 publications

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“…Lasers with pulse durations ranging from a few picoseconds to femtosecond are currently under development; these lasers are referred to as ultra-short pulse lasers, and research using these lasers for laser ablation drilling has been conducted [12][13][14][15][16][17][18]. By using these lasers, the heataffected zone inevitably created during laser ablation can be reduced [19,20].…”

Section: Introductionmentioning

confidence: 99%

Comparison of bending fracture strength of silicon after ablation with nanosecond and picosecond lasers

Noh

Kim

Sohn

et al. 2015

Int J Adv Manuf Technol

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The demands of drilling on silicon wafers in multichip packages (MCPs) that employ laser ablation have increased. In this study, the bending fracture strengths of silicon specimens were experimentally measured using a four-point bending test after ablation with nanosecond and picosecond lasers. The specimens drilled with the picosecond laser showed a mean bending fracture strength (1530 MPa) higher than that of the specimens drilled with the nanosecond laser (678 MPa). One reason for this difference is that the crosssectional roughnesses of the specimens drilled with the picosecond laser were less than those of the samples drilled with the nanosecond laser. Consequently, for the purpose of MCP interconnections, silicon wafer drilling with a picosecond laser is preferable to drilling with a nanosecond laser since the former yields greater bending fracture strength.

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Section: Introductionmentioning

confidence: 99%

Comparison of bending fracture strength of silicon after ablation with nanosecond and picosecond lasers

Noh

Kim

Sohn

et al. 2015

Int J Adv Manuf Technol

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show abstract

“…The samples used in our experiment have dimensions of 20 mm × 20 mm× 2 mm. The samples used in the experiments are made of a constant elastic alloy that has a chemical composition of 48.35% Fe, 42% Ni, 5.5% Cr, 2.5% Ti, 0.8% Mn, 0.8% Si, and 0.05% C [20] . After precision grinding and polishing, the surface roughness of the sample is about 0.1 μm.…”

mentioning

confidence: 99%

“…After precision grinding and polishing, the surface roughness of the sample is about 0.1 μm. The sample in the container is installed on a 3D motion platform (Suruga, Inc.), which is controlled by a computer [20,21] . In the first part of the experiment, laser ablation under distilled water environments with different covering depths was carried out for comparisons.…”

mentioning

confidence: 99%

Experimental research of laser-induced periodic surface structures in a typical liquid by a femtosecond laser

Yue

Duan

et al. 2017

Chin. Opt. Lett.

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A constant elastic alloy is a widely used material with a high elastic modulus and an excellent wave velocity consistency. Different morphologies on the constant elastic alloy surface are observed through femtosecond laser irradiation. When the laser average fluence is set to 0.58 J∕cm 2 and 200 laser pulses, with the increasing depth of distilled water, the period of the laser-induced periodic surface structures (LIPSS) becomes shorter accordingly. The higher the ethanol concentration is, the more spot-shaped structures will be formed among the surface structures when the depth of the coverage of ethanol is 2 mm. The period of the LIPSS reaches its maximum when the concentration of ethanol is 80%.

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Research on ablation process of constant elastic alloy with femtosecond laser in solution medium

Gui-lin

Duan

et al. 2016

Appl. Phys. A

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Effects of femtosecond laser ablation on Vitrovac 6025X

Cited by 3 publications

References 9 publications

Comparison of bending fracture strength of silicon after ablation with nanosecond and picosecond lasers

Comparison of bending fracture strength of silicon after ablation with nanosecond and picosecond lasers

Experimental research of laser-induced periodic surface structures in a typical liquid by a femtosecond laser

Research on ablation process of constant elastic alloy with femtosecond laser in solution medium

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