Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials 2017
DOI: 10.7567/ssdm.2017.m-4-04
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Effects of Deposition Temperature of Amorphous Precursors on Solid-Phase Crystallized Si<sub>1−</sub><i><sub>x</sub></i>Ge<i><sub>x</sub></i>Thin Films on an Insulator

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