Effects of Deposition Temperature and Doping Ratio on Structural and Optoelectronic Properties of ITO Films by Ultrasonic Vibrating Mesh Nebulizer Spray Pyrolysis

Lin, Tzu-Yang; Hsu, Yu-Ting; Lan, Wen−How; Lee, Shao-Yi; Shih, Ming‐Chang; Yang, Cheng-Fu; Lin, Jian-Cheng; Lin, Wen–Jen; Chen, Lung-Chien; Huang, Kai-Feng

doi:10.1166/rase.2015.1072

Rev Adv Sci Engng

2015

DOI: 10.1166/rase.2015.1072

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Effects of Deposition Temperature and Doping Ratio on Structural and Optoelectronic Properties of ITO Films by Ultrasonic Vibrating Mesh Nebulizer Spray Pyrolysis

Tzu-Yang Lin¹,

Yu-Ting Hsu²,

Wen−How Lan³

et al.

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Effects of Deposition Temperature and Doping Ratio on Structural and Optoelectronic Properties of ITO Films by Ultrasonic Vibrating Mesh Nebulizer Spray Pyrolysis

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