1996
DOI: 10.1143/jjap.35.4503
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Effects of Axial Magnetic Field and Faraday Shield on Characteristics of RF Produced Plasma Using Spiral Antenna

Abstract: Influences of the axial magnetic field and Faraday shield on the performance of RF produced plasma using a spiral antenna are investigated. The RF power and filling pressure dependences, antenna-plasma coupling, Ar line intensities and spatial profiles of plasma parameters are studied. With the magnetic field and/or without a Faraday shield, the threshold input power for plasma initiation is lowered and the antenna-plasma coupling is improved. In addition, a collisionless heating mechanism is suggested. With t… Show more

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Cited by 71 publications
(64 citation statements)
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“…6) The target type thrust stand is a good solution for measuring the thrust of a large-diameter, complex and heavy system such as our experimental device, Large Mirror Device (LMD). 7) LMD can accept many diagnostics, such as electrostatic probes (to measure an electron density ne, an electron temperature Te, and an ion velocity vi), spectrometers (gas species, ne, Te, and vi), laser induced fluorescence (vi and relative ni), and high-speed camera (plasma plume, relative ne and n0). Since various plasma parameters can be derived in this device, we can estimate generation and acceleration schemes in detail.…”
Section: Introductionmentioning
confidence: 99%
“…6) The target type thrust stand is a good solution for measuring the thrust of a large-diameter, complex and heavy system such as our experimental device, Large Mirror Device (LMD). 7) LMD can accept many diagnostics, such as electrostatic probes (to measure an electron density ne, an electron temperature Te, and an ion velocity vi), spectrometers (gas species, ne, Te, and vi), laser induced fluorescence (vi and relative ni), and high-speed camera (plasma plume, relative ne and n0). Since various plasma parameters can be derived in this device, we can estimate generation and acceleration schemes in detail.…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, relative density can be obtained from the area of IVDF. Figure 2 shows the LIF measurement system on Large Mirror Device (LMD), 22) and Table 1 shows specifications and operating conditions of this device. The LMD has a tapered quartz tube connected to a main chamber.…”
Section: Lif Schemementioning
confidence: 99%
“…mum of its Doppler spectrum, m the particle mass, and k B the Boltzmann constant. Figure 2 shows a schematic diagram of Large Mirror Device (LMD) [9]. A quartz discharge tube [1,000 mm in length and 100 ∼ 170 mm in inner diameter (i.d.)]…”
Section: Principle Of Lif Measurementmentioning
confidence: 99%