Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals

Abstract

Microtribology of silicon single crystals is one of the key technologies from the viewpoint of reliability of practical application in micro electro mechanical system MEMS . In the study, a silicon single crystal 100 wafer was scratched by a silicon single crystal tip under a very small loading force in various atmospheres and temperatures, which was characterized using an atomic force microscope. In air and water, the silicon single crystal tips were worn greatly. However, the morphology of the scratched wafer surface was quite different; in air the scratched area of the wafer surface was forming a terrace. In vacuum, the tips were worn slightly. In terms of the effects of temperature, the silicon single crystal softened at 473 K was worn. At 673 K, the silicon single crystal wafer was worn greatly and stick slip like phenomenon occurred between the silicon single crystals signi cantly softened. As a result, microtribology is affected by atmospheres or temperatures.