2019
DOI: 10.1016/j.nimb.2019.02.029
|View full text |Cite
|
Sign up to set email alerts
|

Effects of argon thermal annealing on surface structure, microstructural and silicide formation of Silicon-Titanium-Cobalt thin film

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2022
2022
2023
2023

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(1 citation statement)
references
References 15 publications
0
1
0
Order By: Relevance
“…Rutherford backscattering spectrometry (RBS) was employed to study elemental compositions, concentrations and thickness of green synthesized CuO nanocoatings. RBS is the most precise quantitative, and versatile technique of ion beam analysis for elemental surface analysis, and depth pro ling of thin lms without the need for standards (Adeoye et al 2015;Mtshali et al 2019). Figure 7(a-d) shows the RBS spectra of CuO nanocoatings deposited at RS 700, 800, 900, and 1000 rpm carried out using a beam of 3.6 MeV alpha particles respectively.…”
Section: Rutherford Backscattering Spectrometrymentioning
confidence: 99%
“…Rutherford backscattering spectrometry (RBS) was employed to study elemental compositions, concentrations and thickness of green synthesized CuO nanocoatings. RBS is the most precise quantitative, and versatile technique of ion beam analysis for elemental surface analysis, and depth pro ling of thin lms without the need for standards (Adeoye et al 2015;Mtshali et al 2019). Figure 7(a-d) shows the RBS spectra of CuO nanocoatings deposited at RS 700, 800, 900, and 1000 rpm carried out using a beam of 3.6 MeV alpha particles respectively.…”
Section: Rutherford Backscattering Spectrometrymentioning
confidence: 99%