2011
DOI: 10.1016/j.jallcom.2010.10.086
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Effects of annealing temperature on structure and opt-electric properties of ion-conducting LLTO thin films prepared by RF magnetron sputtering

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Cited by 55 publications
(43 citation statements)
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“…The ionic conductivity of -LLTO thin-film is calculated based on its bulk resistance determined by the intercept on Zre axis of EIS curve ( Figure 1d) and its thickness determined in the side-view SEM image (insert in Figure 1c). The as-deposited -LLTO thin-film performs an ionic conductivity of 1.54 × 10-5 S/cm at room temperature, which is comparable to the reported values for -LLTO thin-film solid electrolytes [32][33]. Additionally, the previous literatures have demonstrated -LLTO thin-film solid electrolytes are with excellent chemical and electrochemical stabilities [31].…”
Section: Resultssupporting
confidence: 83%
“…The ionic conductivity of -LLTO thin-film is calculated based on its bulk resistance determined by the intercept on Zre axis of EIS curve ( Figure 1d) and its thickness determined in the side-view SEM image (insert in Figure 1c). The as-deposited -LLTO thin-film performs an ionic conductivity of 1.54 × 10-5 S/cm at room temperature, which is comparable to the reported values for -LLTO thin-film solid electrolytes [32][33]. Additionally, the previous literatures have demonstrated -LLTO thin-film solid electrolytes are with excellent chemical and electrochemical stabilities [31].…”
Section: Resultssupporting
confidence: 83%
“…However, at lithium content of 150% the ionic conductivity of the thin film electrolyte can reach 10 6 S/cm, which is very similar to that reported in the literature [17]. At a lithium content of 180% the ionic conductivity decreased to 3×10 7 S/cm.…”
Section: Analysis Of Impedance Propertiessupporting
confidence: 89%
“…Then, the mixtures were calcined at 1050, 1100 and 1200°C, respectively, all for 12 h [17]. The obtained ceramic was then ball-milled to obtain a fine powder.…”
Section: Preparation Of Targetsmentioning
confidence: 99%
“…However, the XRD patterns for the thin film electrolytes fabricated at the substrate temperatures below 300°C only have broad haloes, showing that the thin films should be of amorphous phase. When the substrate temperature reaches 400°C, other unexpected crystal phases such as ITO come out [20], which indicate the destruction of the ITO films.…”
Section: Structure and Morphology Of The Thin Filmsmentioning
confidence: 99%