We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N 2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.
LLTO thin film electrolytes, RF magnetron sputtering, ionic conductivity, lithium batteries
Citation:Chen R J, Liang W, Zhang H Q, et al. Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries. Chin Sci Bull, 2012, 57: 41994204, doi: 10.1007/s11434-012-5292-y Thin film energy storage has attracted much attention recently because of the application of ultra-miniaturization in microelectronic devices such as dynamic random access memory (DRAMS) and implantable medical devices [1][2][3]. By comparison with other microelectronic sources, thin film lithium batteries can potentially store the most energy applied to microelectronic devices because of their high specific energy, long cycle life, good safety performance and environmental friendliness [4][5][6][7]. Solid electrolytes are important components in thin film lithium batteries and the performance of a thin film lithium battery is greatly affected by its solid electrolyte [8,9]. It has been reported that the ionic conductivity of La 2/3x Li 3x TiO 3 (x=0.11) is able to reach 10 3 S/cm at room temperature, making the study of this kind of electrolyte with high ionic conductivity attractive. Recently, lithium lanthanum titanate (LLTO) has become a very interesting material [10][11][12] because it has a high rate of ionic conductivity in the amorphous state. And the amorphouse LLTO is one kind of fast ionic conductor [13].Thin film fabrication can reduce the thickness of the electrolyte layer, resulting in a reduction in the internal resistance of devices. A large surface area is also necessary to achieve a large contact area for a large output current. RF magnetron sputtering is an effective thin film deposition technology for it can be easily used to fabricate large-scale and dense films with outstanding performance [14][15][16].In this work, we successfully prepared LLTO thin film electrolytes using RF magnetron sputtering. This constitutes a new chemical composition with an amorphous glassy structure and predominantly ionic conduction. We prepared the nitride LLTO films for the first time with different li...