Integrated Ferroelectrics
 2021
DOI: 10.1080/10584587.2021.1964296
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Effects of Annealing Temperature on Crystal Structure and Microstructure of PZT Thin Films (52/48) Prepared by RF Magnetron Sputtering

Pakinee Thongrit
1
,
Mati Horprathum
2
,
Kamonpan Pengpat
3
et al.
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