Effects of an alternating field in field-aided lateral crystallization process for low temperature poly-silicon

Choi, Sung-Hwa; Lee, Sung Bo; Kim, Young-Woong; Kim, Chang Kyung; Choi, Duck–Kyun

doi:10.1016/j.tsf.2005.11.007

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Fe-rtp System1

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2007

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“…The FE-RTP heat treatment involves rapid thermal heating of glass in combination with alternating magnetic-field induction to enhance heating efficiency. 4,5 Figure 2 shows the flatness of the glass after FE-RTP heat treatments at various temperatures. Their values are compared with normal glass without heat treatment.…”

Section: Fe-rtp Systemmentioning

confidence: 99%

Development of rapid thermal processor for large‐glass LTPS production

Shin¹,

Kim²

2007

J Soc Info Display

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Abstract— A field‐enhanced rapid‐thermal‐processor (FE‐RTP) system that enables LTPS LCD and AMOLED manufacturers to produce poly‐Si films at low cost, high throughput, and high yield has been developed. The FE‐RTP allows for diverse process options including crystallization, thermal oxidation of gate oxides, and fast pre‐compactions. The process and equipment compatibility with a‐Si TFT manufacturing lines provides a viable solution to produce poly‐Si TFTs using a‐Si TFT lines.

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Section: Fe-rtp Systemmentioning

confidence: 99%