Effects of alloy composition, cavity aspect ratio, and temperature of imprinted ZrCu metallic glass films: a molecular dynamics study

Wu, Cheng-Da; Li, Rui-En

doi:10.1007/s00339-020-3398-7

Cited by 7 publications

(2 citation statements)

References 33 publications

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“…A near-spherical shaped mold was chosen to compensate for the spring-back effect that occurs with conventional hemispherical molds. Typical hemispherical molds cannot reproduce deeper cavities in metals resulting in non-optimal and shallow dimples [ 44 , 45 ]. Thus, a near-spherical shaped mold would imprint deeper within the substrate and provide adequate dimple depth in spite of the spring-back effect.…”

Section: Methodsmentioning

confidence: 99%

Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting

Gaikwad

Desai

2021

Materials

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Understanding the deformation behavior during nanoimprint lithography is crucial for high resolution patterning. Molecular dynamics modeling was implemented to investigate the effect of different mold profiles (cylindrical, rectangular, and spherical) on the von Mises stress, lattice dislocations, and material deformation. Relatively higher von Mises stress (1.08 × 107 Pa) was observed for the spherical mold profile compared to the rectangular and cylindrical profiles due to the larger surface area of contact during the mold penetration stage of NIL. Substantial increases in the von Mises stress were observed for all the mold geometries during the mold penetration stage. The von Mises stresses had a reduction in the relaxation and mold retrieval stages based on the rearrangement of the gold atoms. The lattice dislocation during the deformation process revealed the formation of the BCC structure which further reverted to the FCC structure after the mold retrieval. The polyhedral template matching (PTM) method was used to explain the retention of the FCC structure and subsequent ductile behavior of the substrate. The cylindrical mold had the lowest percentage spring back in both of the orthogonal directions and thus replicated the mold profile with high-fidelity as compared to the spherical and rectangular molds. The findings of this research can aid the design of molds for several applications.

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Section: Methodsmentioning

confidence: 99%

Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting

Gaikwad

Desai

2021

Materials

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“…Teir results indicated that the nanoimprint templates exhibited an excellent fexibility and environmental stability, which was suitable for highresolution imprint lithography with good industrialization prospects. Using molecular dynamics (MD) simulation, the pattern transfer mechanism of ZrCu MG flms under a nanoimprinting process was evaluated, and it was found that the imprinting at large aspect ratio or high temperatures shortened the flling time [19]. Doan et al [20] indicated that the increase in angle of the punch led to rise of imprinting force and the shear transformation zones (STZs) of the CuZr glassy flms.…”

Section: Introductionmentioning

confidence: 99%

Mechanism of Imprinting Process in the Ni-P Metallic Glass Films: A Molecular Dynamics Study

Riyadi

Sivaraman

Wais³

et al. 2023

Advances in Materials Science and Engineering

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In this study, the molecular dynamics (MD) simulation was used to evaluate the role of imprinting temperature and the mold-cavity geometry on the imprinted Ni-P metallic glass (MG) films. Considering the outcomes of simulation, it was found that the tip-like and groove patterns showed different filling time for the imprinting process. At room temperature (300 K), the plastic deformation in the tip-like pattern was in a ring shape enclosing the mold, while the plastic deformation in the groove-pattern geometry was mainly localized at the wall of mold. Moreover, it was determined that the imprinting at high temperature (700 K) led to the shortening of pattern filling time and the decrease of loading force in both geometries. The strain concentration and localized plastic deformation were also removed in the high-temperature imprinting process. On the other hand, the unloading process at room temperature (300 K) improved the imprinting quality due to the lower elastic recovery.

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Assessment of Nano-Imprinting Process in CuZr Amorphous Films Through Combination of Machine Learning and Molecular Dynamics

Sayed

Al-Sakhnini

Al-Zubaidi³

et al. 2023

J. Electron. Mater.

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Effects of alloy composition, cavity aspect ratio, and temperature of imprinted ZrCu metallic glass films: a molecular dynamics study

Cited by 7 publications

References 33 publications

Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting

Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting

Mechanism of Imprinting Process in the Ni-P Metallic Glass Films: A Molecular Dynamics Study

Assessment of Nano-Imprinting Process in CuZr Amorphous Films Through Combination of Machine Learning and Molecular Dynamics

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