Effects of a low-pressure water jet assisting the laser etching of polycrystalline silicon

Chen, Xuehui; Li, Xiang; Song, Wei; Wu, Chao; Zhang, Yao

doi:10.1007/s00339-018-1987-5

Cited by 8 publications

(7 citation statements)

References 20 publications

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“…Large convective heat transfer will bring some loss to the laser and the heat from the surface of the material. The calculation of convective heat transfer is to obtain the heat transfer coefficient between the water jet and the material surface and derive the heat transfer coefficient at different jet velocities, which satisfies the following equation [ 21 , 23 , 24 ]:

…”

Section: Theoretical Analysis Of Water Jet Actionmentioning

confidence: 99%

“…In water-jet-assisted laser processing, the laser plays the role of heating and softening the material [ 21 ]. When the water-jet hits the processing area for cooling, its kinetic energy is bound to have a continuous impact on the processing area, and a schematic diagram of the impact material is shown in Figure 1 .…”

Section: Theoretical Analysis Of Water Jet Actionmentioning

confidence: 99%

“…The experimental results show that the processing parameters have a direct influence on the groove depth and micro-morphology, in which the laser pulse energy and water-jet pressure play a major role in all the influencing factors. Chen et al [ 21 , 22 ] used low-pressure water-jet-assisted laser etching of polysilicon materials and studied the changes of etching groove depth, volume, and laser energy utilization efficiency under multiple process parameters. The results show that low-pressure water-jet-assisted laser etching technology can improve the problems of traditional laser etching, such as micro-cracking, slagging, and recast layer formation, to improve the quality of machined parts.…”

Section: Introductionmentioning

confidence: 99%

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Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining

Chen

Liu

et al. 2020

Materials

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This paper studies the compound effect of liquid medium and laser on the workpiece and analyses the law of material surface temperature change during the processing. Taking 7075-T6 aluminum alloy as the research object, the surface temperature field of aluminum alloy processed using water-jet-assisted laser machining under different process parameters was simulated using finite element software. In addition, the temperature field of the material surface was detected in real-time using the self-built water-jet-assisted laser machining temperature field detection system, and the processing results were observed and verified using an optical microscope, scanning electron microscope, and energy spectrum analyzer. The results show that when the water jet inflow angle is 45°, the heat-affected area of the material surface is the smallest, and the cooling effect of the temperature field of the material surface is better. Considering the liquidus melting point of 7075 aluminum alloys, it is concluded that the processing effect is better when the water jet velocity is 14 m·s−1, the laser power is 100 W, and the laser scanning speed is 1.2 mm·s−1. At this time, the quality of the tank is relatively good, there are no cracks in the bottom of the tank, and there is less slag accumulation. Compared with anhydrous laser etching, water-jet-assisted laser etching can reduce the problems of micro-cracks, molten slag, and the formation of a recast layer in laser etching and improve the quality of the workpiece, and the composition of the bottom slag does not change. This study provides theoretical guidance and application support for the selection and optimization of process parameters for water-jet-assisted laser etching of aluminum alloy and further enriches the heat transfer mechanism of multi-field coupling in the process of water-jet-assisted laser machining.

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…”

Section: Theoretical Analysis Of Water Jet Actionmentioning

confidence: 99%

Section: Theoretical Analysis Of Water Jet Actionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining

Chen

Liu

et al. 2020

Materials

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“…Affected by the material properties of aluminum alloys and the effect of laser heat, there are phenomena such as a large heat-affected zone and slag accumulation during laser processing [ 8 ]. In order to reduce the defects existing in laser processing, researchers have introduced liquids in laser processing to effectively reduce or eliminate defects, and a large number of studies have been performed [ 9 ].…”

Section: Introductionmentioning

confidence: 99%

Effects of Laser Machining Aluminum Alloy in Different Media

Huang

Tang

et al. 2022

Micromachines

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To study the effects of aluminum alloys processed by a laser in air and water and at different water velocities, corresponding experiments were conducted and the impacting effects of different water velocities on the surface of the workpiece were simulated, respectively. The results show that when laser processing aluminum alloy materials in air, there is more slag and a recondensation layer on both sides of the groove, the heat-affected zone is larger and the surface processing quality is poor. When laser processing aluminum alloy materials in water, the processing quality is improved. With the increase in water velocity, the impacting and cooling effect is enhanced, the groove depth and groove width show a trend of first increasing and then decreasing, the slag and recondensation layer on both sides of the groove are reduced, the heat-affected zone is reduced and the processing quality of the groove is improved. When the water velocity reaches 30 m/s, a better groove can be obtained. Laser processing aluminum alloy materials in water can obtain better processing quality than laser processing in air.

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“…In this paper, water jets with different angle and velocities were used to assist laser etching of polysilicon. Previously, we studied the effect of different water jet velocities on the processing grooves when the water jet angle was 30 • [19]. However, to the best of our knowledge, the effects of changing both the water-jet angle and velocity on the depth and width of the etched grooves have not been investigated.…”

Section: Introductionmentioning

confidence: 99%

Optimization of Processing Parameters for Water-Jet-Assisted Laser Etching of Polycrystalline Silicon

Chen

et al. 2019

Applied Sciences

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Liquid-assisted laser technology is used to etch defect-free materials for high-precision electronics and machinery. This study investigates water-jet-assisted laser etching of polysilicon material. The depths and widths of the etched grooves were investigated for different water-jet incident angles and velocities. To select optimal parameters for a composite etching processing, the results of many tests must be compared, and at least one set of good processing parameter combinations must be identified. Herein, the influence of different parameters on the processing results is studied using an orthogonal test method. The results demonstrate that the depths and widths of the processing grooves were nearly identical at water-jet angles of 30°and 60°; however, the 60° incidence conferred a slight advantage over 30° incidence. The section taper, section depth, and surface topography were optimized at a water-jet velocity of 24-m/s, 1.1-ms laser pulse width, 40-Hz frequency, and 180-A current. Under these conditions, the section taper and groove depth were 1.2° and 1.88 mm, respectively. The groove surfaces exhibited no splitting, slagging, or other defects, and no recast layers were visible.

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Effects of a low-pressure water jet assisting the laser etching of polycrystalline silicon

Cited by 8 publications

References 20 publications

Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining

Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining

Effects of Laser Machining Aluminum Alloy in Different Media

Optimization of Processing Parameters for Water-Jet-Assisted Laser Etching of Polycrystalline Silicon

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