Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors

Itakura, Akiko N.; Toda, Masaya; Miyake, Koji; Förch, Renate; Berger, Rüdiger

doi:10.7567/jjap.52.110111

Cited by 5 publications

(5 citation statements)

References 35 publications

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“…The deflection behavior of MCS can be described as being similar to the bending of a bi‐metallic strip upon temperature changes . The change in deflection

Δ δ

of a bi‐material strip upon humidity changes

Δ H

is given by

Δ δ = \frac{l^{2}}{2 R} = \frac{3 l^{2} E_{Si} E_{film} t_{Si} t_{film} true(t_{Si} + t_{film} true)}{{(E_{Si} {t_{Si}}^{2})}^{2} + {(E_{film} {t_{film}}^{2})}^{2} 2 E_{Si} E_{film} t_{Si} t_{film} true(2 {t_{Si}}^{2} + 3 t_{Si} t_{film} + 2 {t_{film}}^{2} true)} true(α_{film} - α_{Si} true) Δ H

where

α_{film}

and

α_{Si}

are linear expansion coefficients of film and Si at a given H ,

E_{Si}

and

E_{film}

are

E

of Si and film,

t_{Si}

and

t_{film}

are thicknesses of the Si cantilever beam and film,

l

is a length of the cantilever beam. The geometric values of

l

t_{Si}

, and

t_{f...}

…”

Section: Measurement Principlesmentioning

confidence: 99%

Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Toda

Miyake

Chu

et al. 2018

Plasma Processes & Polymers

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Mechanical properties of ultra‐thin organic films are fundamentally important in coating applications. Micromechanical cantilever sensor (MCS) and laser‐based surface acoustic wave (LA‐SAW) techniques were both used to measure Young's moduli (E) of plasma polymerized films at different humidities (H). For plasma polymerized allylamine (ppAA) films deposited at 5 W and 90 W, E of 1400 ± 350 MPa and 110 ± 20 MPa at H between 10 and 40%, and 1070 ± 250 MPa and 32 ± 10 MPa at H between 70 and 80% were measured. The LA‐SAW technique revealed E lower than 60% of that measured by MCS. The difference suggested either an enhanced swelling at the air interface or a gradient of cross‐linking density.

show abstract

“…The deflection behavior of MCS can be described as being similar to the bending of a bi‐metallic strip upon temperature changes . The change in deflection

Δ δ

of a bi‐material strip upon humidity changes

Δ H

is given by

Δ δ = \frac{l^{2}}{2 R} = \frac{3 l^{2} E_{Si} E_{film} t_{Si} t_{film} true(t_{Si} + t_{film} true)}{{(E_{Si} {t_{Si}}^{2})}^{2} + {(E_{film} {t_{film}}^{2})}^{2} 2 E_{Si} E_{film} t_{Si} t_{film} true(2 {t_{Si}}^{2} + 3 t_{Si} t_{film} + 2 {t_{film}}^{2} true)} true(α_{film} - α_{Si} true) Δ H

where

α_{film}

and

α_{Si}

are linear expansion coefficients of film and Si at a given H ,

E_{Si}

and

E_{film}

are

E

of Si and film,

t_{Si}

and

t_{film}

are thicknesses of the Si cantilever beam and film,

l

is a length of the cantilever beam. The geometric values of

l

t_{Si}

, and

t_{f...}

…”

Section: Measurement Principlesmentioning

confidence: 99%

Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Toda

Miyake

Chu

et al. 2018

Plasma Processes & Polymers

Self Cite

View full text Add to dashboard Cite

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“…In this case upon exposure to humidity, water molecules diffuse into the PEM film resulting in a swelling of the film. Depending on the mechanical properties of the films, the swelling induces a stress that leads to a deflection of the NMC. , Thus simultaneously to the measured frequency changes we also followed the deflections of the NMCs (Figure c). Upon increasing the humidity, the PEM-coated NMC deflected away from the polymer coating as expected for swelling of the PEM.…”

Section: Resultsmentioning

confidence: 99%

“…From this plot it is clear that the deflection does not depend solely on the humidity change Δ H as described by equation normalΔ δ = l 2 2 R = 3 l 2 E Si E film h Si h film ( h Si + h film ) false( E Si h Si 2 false) 2 + false( E film h film 2 false) 2 + 2 E Si E film h Si h film ( 2 h Si 2 + 3 h Si h film + 2 h film 2 ) α solv normalΔ H where l is the length and R is the curvature of the bending NMC. E Si and E film are the Young’s moduli of Si and the film on the NMC, respectively …”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Thin Polyelectrolyte Multilayers Made by Inkjet Printing and Their Characterization by Nanomechanical Cantilever Sensors

et al. 2014

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Measurements with nanomechanical cantilever (NMC) sensors often reveal only qualitative results. Here we overcome this issue by inkjet printing well-defined polyelectrolyte multilayers (PEMs). We present a method that allows fabricating a 40 bilayer (BL) thick and 5 mm long line made of poly(allylamine hydrochloride) (PAH) and polystyrene sulfonate (PSS). NMC sensors were used to quantify the uptake of water in thin PEMs. We measured and analyzed the mass loading and the swelling response of the PEMs upon exposure to relative humidity between 5% and 80%. For a film made of 5 BLs we determined a Young's module of ∼390 MPa for low humidity (<5%). Thicker PEM films made by 10 BLs exhibited a higher Young's module of ∼560 MPa. The Young's module decreased in both cases to 2−3 MPa at 80% relative humidity. Furthermore, the NMC measurements of mass and swelling upon exposure to humidity indicated a thickness-dependent swelling of the PEMs.

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“…For example, Depth Sensing Indentation (DSI) method is used for relatively small amounts of testing materials and there are no strict requirements for a sample shape [2]. Nanoindentation [3], phase velocity [4], micromechanical cantilever [5] techniques are used for Young's modulus determining in thin film material. In case of small dimension samples interferometric strain/displacement gage (ISDG) technique can be used [6].…”

Section: Introductionmentioning

confidence: 99%

High precision ΔE effect measurement with the use of ultrasonic-wave-time-of-flight method

Grzelak¹

2016

ELECTROTECHNICAL REVIEW

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The paper provides description of very accurate measurement method of ferromagnetic rod Young modulus variations (∆E effect) as a function of the magnetic field. The Young's modulus variations measurement principle is based on change of sound velocity. The high resolution time of flight of ultrasonic wave measurement was applied. High resolution as good as 15 ps TDC (Time to Digital Converter) implemented in FPGA (Field Programmable Gate Array) was used. This feature allows measuring ∆E with accuracy of about a few ppm. The measurement accuracy mainly depends on resolution of time of flight measurement and sound speed in the tested material. The analog front-end part which is responsible for the time location of the reflected ultrasonic wave is very important part of the measurement system. In the article the results of measurements for different samples made of carbon steel are described. Streszczenie. W artykule przedstawiono metodę pomiaru zmiany modułu Younga w pręcie ferromagnetycznym pod wpływem pola magnetycznego. Zastosowana metoda pomiaru zmiany modułu Younga polega na wysokorozdzielczym pomiarze czasu przelotu fali ultradźwiękowej. Zastosowano układ TDC (Time to Digital Converter) zaimplementowany w strukturze FPGA (Field Programmable Gate Array) o rozdzielczości rzędu 15 ps, co pozwala mierzyć zmianę modułu Younga z dokładnością kilku ppm. Uzyskiwana rozdzielczość pomiaru zależy głównie od rozdzielczości pomiaru czasu jak i od prędkości rozchodzenia się fali ultradźwiękowej w ośrodku. Ważnym elementem systemu pomiarowego jest analogowy układ do lokalizacji w czasie czoła odbitej fali ultradźwiękowej. Zaprezentowano również przykładowe wyniki pomiarów dla różnych gatunków stali węglowej. (Precyzyjny pomiar zmiany modułu Younga metodą czasu przelotu fali ultradźwiękowej).

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Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors

Cited by 5 publications

References 35 publications

Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Thin Polyelectrolyte Multilayers Made by Inkjet Printing and Their Characterization by Nanomechanical Cantilever Sensors

High precision ΔE effect measurement with the use of ultrasonic-wave-time-of-flight method

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