Effective Surface Treatments for Selective Epitaxial SiGe Growth in Locally Strained pMOSFETs

Liao, Chin-I; Chen, Yi-Cheng; Cheng, Po-Lun; Wang, Hsiang-Ying; Chien, Chin-Cheng; Yang, C. L.; Huang, K.T.; Tzou, S.F.; Tang, Jinsong; Kodali, R.; Washington, L.; Chang, V.C.; Fu, T.; Cho, Yonah

doi:10.1109/istdm.2006.1662622

2006 International SiGe Technology and Device Meeting

DOI: 10.1109/istdm.2006.1662622

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Effective Surface Treatments for Selective Epitaxial SiGe Growth in Locally Strained pMOSFETs

Chin-I Liao¹,

Yi-Cheng Chen²,

Po-Lun Cheng³

et al.

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Effective Surface Treatments for Selective Epitaxial SiGe Growth in Locally Strained pMOSFETs

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