Effective removal of metal-carbide contamination from diamond circuit boards by reactive ion etching

Edalati, Khatereh; Higham, Simon; De Leon, Sorel E.; Au, Shun Long Cyril; Nadarajah, Athavan; Prawer, Steven; Garrett, David J.

doi:10.1016/j.diamond.2023.110329

Diamond and Related Materials

2023

DOI: 10.1016/j.diamond.2023.110329

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Effective removal of metal-carbide contamination from diamond circuit boards by reactive ion etching

Khatereh Edalati,

Simon Higham,

Sorel E. De Leon

et al.

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Effective removal of metal-carbide contamination from diamond circuit boards by reactive ion etching

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References 46 publications

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