“…Recently, vertically structured GaN-based LEDs (VLEDs) based on the change of a sapphire substrate to a metal or semiconductor substrate have been shown to be very promising in enhancing light output, efficiency, and power capability. 4,5) However, with the existence of a large refractive index difference between GaN (n ¼ 2:45) and air (n ¼ 1), a low critical angle of total internal reflection ($23:6 ) and a poor light extraction ratio (4%) 6) impede the light output power of VLEDs. Over the past decade, numerous surface roughening technologies, such as the use of a patterned sapphire substrate with a laser lift-off (LLO) process, 7) surface roughening using inductively coupled plasma (ICP) dry etching, 8) photoelectrochemical (PEC) etching, 9) the use of a micro-photolithographic system with dry and wet etching, 10) PEC for the roughening of oxide passivation mesa sidewalls, 11) and the use of a Ni nanomask with laser etching, 12) have been demonstrated to increase light extraction efficiency through random scattering from the roughened surface for high-power GaN-based LEDs.…”