Effective conductivity measurements of silver coatings employing sapphire dielectric resonator technique

Microwave and RF methods of contactless mapping of the sheet resistance and the complex permittivity of conductive materials and semiconductors

“…One can observe that from the measured resonance frequency and Q-factor, one can uniquely determine the surface conductivity value in the range 0.0001 S < σ h < 10 S, which corresponds to the surface resistance values in the range 0.1 /square < R S < 10 000 /square. Materials having lower surface resistance values (even superconductors) can still be measured employing the sapphire dielectricresonator technique [5]. It should be pointed out that for materials having small sheet resistance values (below 10 /square), it is impossible to determine the real part of their permittivity.…”

“…Alternatively to the RF and TDCM methods microwave techniques can be used to measure the resistivity and sheet resistance of conducting films. In the last few years split-post and single-post dielectric resonators have been developed for contactless resistivity measurements in the range 10 −5 -10 5 cm. These methods have already been applied for the measurements of semiconductor wafers [4], thin metal films [5,6], conductive polymer films [7], graphene and epitaxial SiC layers deposited on semi-insulating SiC substrates [8] and planar metamaterials (metal-dielectric) [6].…”

“…In the last few years split-post and single-post dielectric resonators have been developed for contactless resistivity measurements in the range 10 −5 -10 5 cm. These methods have already been applied for the measurements of semiconductor wafers [4], thin metal films [5,6], conductive polymer films [7], graphene and epitaxial SiC layers deposited on semi-insulating SiC substrates [8] and planar metamaterials (metal-dielectric) [6]. This paper is devoted to the comparison of RF and microwave techniques intended for sheet-resistance mapping instruments.…”