2006
DOI: 10.1016/j.jcrysgro.2006.06.044
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Effect of zero-Gauss plane and magnetic intensity on oxygen concentration in cusp-magnetic CZ crystals

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Cited by 9 publications
(4 citation statements)
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“…The stronger MI in the lower section of the cusp-magnetic field grasps the larger amount of the silicon melt with increasing MR, and hence the melt flow is more stable. The stable flow results in higher k e in the crystal, and the oxygen concentration decreases [20]. k e increases with increasing MR as shown in Fig.…”
Section: Article In Pressmentioning
confidence: 80%
See 1 more Smart Citation
“…The stronger MI in the lower section of the cusp-magnetic field grasps the larger amount of the silicon melt with increasing MR, and hence the melt flow is more stable. The stable flow results in higher k e in the crystal, and the oxygen concentration decreases [20]. k e increases with increasing MR as shown in Fig.…”
Section: Article In Pressmentioning
confidence: 80%
“…The specific Ra and more details are shown in Ref. [20]. At the same free-surface position at fixed heater, the magnetic strength at the corner position of the crucible in the initial 150 kg melt is stronger than that of the initial 120 kg melt.…”
Section: Article In Pressmentioning
confidence: 99%
“…The magnetic strengths are 210 and 240G with 128 A/230 A and 152 A/274 A, which represent the intensity of the horizontal component of the magnetic field orthogonal to crucible side wall at the zero-Gauss plane. Magnet field configuration and effect of the cusp-magnetic field on oxygen concentration 6) and point defect behavior 7) can be found in other papers.…”
Section: Critical Growth Rates With Various Cooling Rates Of the Ingotmentioning
confidence: 97%
“…It is possible to lower the oxygen content of silicon crystals formed by employing a CZ technique with a cusp magnetic field. [88][89][90][91][92][93][94] The impact of a cusp magnetic field on the melt flow, thermal field, and oxygen concentration during the CZ silicon crystal development process has been investigated using numerical simulation. The results demonstrate a decrease in oxygen concentration as a result of the secondary flow cell's shrinkage, which occurred between the Taylor-Proudman and buoyancy-driven vortices.…”
Section: Cz Processmentioning
confidence: 99%