Abstract:In this paper, the high temperature solid state reaction method was applied to the preparation of SrTiO 3 ceramic target.The phase of the target has been researched in experiment by X-ray diffraction (XRD). We found that solid state reaction has achieved completely. Then SrTiO 3 thin films on MgO (100) substrate were manufactured by PLD using the triple-frequency harmonics of pulsed laser Nd: YAG. The thickness of the SrTiO 3 thin films was measured using a stylus profiler. Their microstructure and surface mor… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.