Effect of ultrasonic treatment (UST) with an amplitude of oscillating tension-compression stresses 100 MPa on the characteristics of superplastic deformation of Ti-6Al-4V alloy with an ultrafine grained (UFG) structure processed by equal-channel angular pressing (ECAP) is studied. During tensile tests at 600°C with initial strain rates in the interval from 10-4 to 10-3 s-1, ultrasonically irradiated samples exhibit a reduced flow stress, higher values of the strain rate sensitivity coefficient and elongation to failure as compared to the samples tested directly after ECAP. Detailed studies of the microstructure of samples subjected to ECAP only and ECAP followed by UST revealed no considerable differences. It is suggested that the UST affected fine structure of the material bringing them to a state with a higher ability of relaxation of deformation-induced defects.