Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad

Jun, 黎军 Li; Lei, 夏磊 Xia; Xiao-ming, 王晓明 Wang; Yong-wei, 朱永伟 Zhu; Dunwen, 左敦稳 Zuo

doi:10.3788/ope.20142212.3287

Cited by 3 publications

(1 citation statement)

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“…It is found that the quartz glass powder is detected in the pore area of the test sample surface at the diffraction angle of about 20 degrees after the experiments. It was demonstrated that the materials blocking the surface pores of FAP are wear debris of polishing pad and quartz glass powder (Li et al , 2017;Li et al , 2014;Tang et al , 2020). The debris particles concentration at the contact interface is increased, and the pore on the sample surface is more easily blocked, which results in the low surface roughness value (Lu et al , 2002; Zheng et al , 2017).…”

Section: Resultsmentioning

confidence: 99%

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tian,

Wu,

Pang

et al. 2023

ILT

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Purpose This study aims to clarify the influence mechanism of polishing solution type on the glazing evolution of fixed abrasive pad under different interfacial pressure conditions. Design/methodology/approach The tribological experiments were carried out on the friction and wear machinery with W3-5 diamond fixed abrasive pad and quartz glass workpiece under three polishing solution types of five pressure conditions. The changes of surface morphology, porosity and hardness of fixed abrasive pad were detected by white light interferometer, optical microscope and shore hardness tester. Findings The results showed that the glazed phenomenon of fixed abrasive pad is occurred after a certain time, which is more obvious with the increasing of interfacial pressures. The polishing solution type has a significant effect on the glazing time, although the glazed phenomenon is inevitable. The mechanism of it is that the micro-convex peaks on the surface of the fixed abrasive pad are easily wear, and the pores are blocked by the accumulation of waste debris generated during the experiment process. Thus, a smooth and high-density hard layer is formed on the surface of the fixed abrasive pad which induces the decreasing of the friction coefficient and surface roughness value. For selected polishing solution types, the wear rate of micro-convex peaks is different due to the corrosion action difference with polishing pad surface. Originality/value The main contribution of this work is to provide a new investigating method for further understanding the glazing evolution mechanism of fixed abrasive pad. Peer review The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-08-2023-0257/

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Section: Resultsmentioning

confidence: 99%

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tian,

Wu,

Pang

et al. 2023

ILT

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Effect of alkaline slurries on nano machining CaF₂crystal

Song

Huang

et al. 2016

Integrated Ferroelectrics

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The slurry chemical action affects chemical reaction between the wafer and slurry, and self-conditioning performance of the pad in nano machining process. Fixed abrasive polishing, one of important nano machining technologies, was adopted to achieve a nano precision surface quality of CaF 2 crystal. Five kinds of alkaline regulators, triethanolamine, sodium citrate, sodium carbonate, ethylenediamine and sodium phosphate in slurries with pH 10, were screened in nano machining CaF 2 crystal. The effect on material removal rate (MRR), surface topography and surface roughness was investigated in fixed abrasive polishing of CaF 2 crystal. The results indicated that surface quality is getting better with MRR decreasing. The optimal surface quality of CaF 2 crystal with surface roughness Sa 4.13 nm can be obtained by sodium phosphate slurry with MRR 224 nm/min in fixed abrasive polishing of CaF 2 crystal. The nanometer precision surface quality with high material removal was achieved in nano machining CaF 2 crystal.

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Effect of process parameters on fixed abrasive pad self-conditioning in micro/nano machining

Tang

Hua

et al. 2017

Integrated Ferroelectrics

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Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad

Cited by 3 publications

References 0 publications

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Effect of alkaline slurries on nano machining CaF₂crystal

Effect of process parameters on fixed abrasive pad self-conditioning in micro/nano machining

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Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad

Cited by 3 publications

References 0 publications

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Effect of alkaline slurries on nano machining CaF2crystal

Effect of process parameters on fixed abrasive pad self-conditioning in micro/nano machining

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Product

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Effect of alkaline slurries on nano machining CaF₂crystal