Effect of Thermal Stress and Residual Gas Pressure on the Thermal Response of Optical Fiber Fabry-Perot Pressure Sensor

Zhenhai, 吴振海 Wu; Tiegen, 刘铁根 Liu; Junfeng, 江俊峰 Jiang; Kun, 刘琨 Liu; Shuang, 王双 Wang; Jinde, 尹金德 Yin; Shengliang, 邹盛亮 Zou; Zunqi, 秦尊琪 Qin; Fan, 吴凡 Wu

doi:10.3788/aos201535.0328005

Cited by 2 publications

(1 citation statement)

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“…Aiming at the problem of the temperature influence of MEMS pressure sensors, some scholars analyzed or tested the temperature characteristics but did not give specific solutions or ignored the temperature effect. Jiang Xiaofeng et al [28] designed an optical fiber F-P pressure sensor based on white light interference demodulation, and the temperature sensitivity was about 1.4 nm/ • C. Wu Zhenhai et al [29] conducted modeling and experimental analysis on the factors influencing the temperature performance of the MEMS pressure sensor and obtained the conclusion that the temperature sensitivity was 0.2333 nm/ • C in the ideal model. Ming Li et al [15] designed a simple and small optical fiber F-P pressure sensor using surface and bulk MEMS technology but did not give a solution to the temperature dependence.…”

Section: Introductionmentioning

confidence: 99%

Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

Yao

Shang

et al. 2022

Photonics

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The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method by converting the wavelength is proposed. The influence of target temperature and data point selection on the compensation effect is studied, and the effectiveness of the method is verified by the temperature compensation of sensors before and after aging. When the converted target temperature is 25 °C, the pressure measurement accuracy of the sensor is improved from 1.98% F.S. to 0.38% F.S. within the range of 5–45 and 0–4 MPa. The method proposed in this paper can not only improve the accuracy but also make the regular calibration more operable.

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Section: Introductionmentioning

confidence: 99%