Effect of Thermal Annealing on Low-K Dielectrics for iBEOL in View of 3D Sequential Integration

Beaurepair, S.; Jousseaume, V.; Gonon, P.; Bsiesy, A.; Guérin, C.; Rochat, N.; Licitra, C.; Charvet, P-L.; Veillerot, M.; Rambal, N.; Nouguier, D.; Ney, D.; Federspiel, X.; Fenouillet-Béranger, C.

doi:10.1109/iitc.2018.8430465

2018 IEEE International Interconnect Technology Conference (IITC) 2018

DOI: 10.1109/iitc.2018.8430465

|View full text |Cite

Effect of Thermal Annealing on Low-K Dielectrics for iBEOL in View of 3D Sequential Integration

S. Beaurepair

V. Jousseaume

P. Gonon

et al.

Abstract: Conclusion Annexes Liste des symboles Glossaire Liste des figures Liste des tableaux « Le secret du bonheur consiste à s'accommoder de toutes les catastrophes. »

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Publication Types

Select...

Relationship

Self Cite0

Independent0

Authors

Journals

Cited by 0 publications

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

No citations

Set email alert for when this publication receives citations?

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Effect of Thermal Annealing on Low-K Dielectrics for iBEOL in View of 3D Sequential Integration

Abstract: Conclusion Annexes Liste des symboles Glossaire Liste des figures Liste des tableaux « Le secret du bonheur consiste à s'accommoder de toutes les catastrophes. »

Cited by 0 publications

References 25 publications

No citations

Contact Info

Product

Resources

About