2003
DOI: 10.1016/s0040-6090(03)00568-6
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Effect of the substrate bias potential on crystalline grain size, intrinsic stress and hardness of vacuum arc evaporated TiN/c-Si coatings

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Cited by 43 publications
(11 citation statements)
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“…the crystallite size increases with the increase in substrate bias. This result is also in agreement with TiN coatings obtained by Espinoza-Beltran et al [25]. However, the exact correlation between crystallite size, lattice strain and substrate bias is not known so far and further detailed study accounting for this result is still needed.…”
Section: Xrd Analysissupporting
confidence: 91%
“…the crystallite size increases with the increase in substrate bias. This result is also in agreement with TiN coatings obtained by Espinoza-Beltran et al [25]. However, the exact correlation between crystallite size, lattice strain and substrate bias is not known so far and further detailed study accounting for this result is still needed.…”
Section: Xrd Analysissupporting
confidence: 91%
“…By this method was analyzed the line profile of the diffraction peaks, which allow obtained estimates of 2θ angular position of both TiN and BN phases and the crystalline grain size of the coatings. The details of the diffraction peaks analysis, using the WA method, were presented in previous publication [17].…”
Section: Methodsmentioning
confidence: 99%
“…Elemental powders of Al and Ti (99.8 and 99.5% pure, respectively and average particle size 50 m) were mixed to prepare several Ti-Al compositions (Ti 100−x Al x , x = 8.5, 16 410, with diameters of 3.3 mm and 8.0 mm, were introduced in a hardened steel vial, evacuated and sealed in a glove box, which was filled with 99.9% of pure argon. The total powder weight was 8.0 g and the ball to powder ratio was 5:1.…”
Section: Methodsmentioning
confidence: 99%
“…We confirmed the existence of a compromise between brittleness of hydrides and welding of aluminum, both processes showing a strong dependence on the titanium and aluminum contents. The average grain size of the IRBM milled powders was determined from XRD data by applying a profile analysis to all diffraction peaks (Ti, Al, TiH 1.924 , and TiN) in accord with the Warren-Averbach method [16]. Results as a function of milling time for Ti-8.5 at.% Al (Ti-5 wt.% Al) and Ti-72.7 at.% Al (Ti-60 wt.% Al) powders are shown in Figs.…”
Section: Powder Preparationmentioning
confidence: 99%