Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge

Shveigert, I. V.; Peeters, F. M.

doi:10.1134/s0021364007210047

Cited by 10 publications

(4 citation statements)

References 11 publications

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“…The simulation of rf discharge with nanoparticles carried out using PIC-MCC method is represented in [18]. Authors of this paper succeeded to describe the transition between capacitive and volume modes of discharge with increase of particle size, considering the experimentally measured change of discharge voltage caused by particle size variation.…”

Section: Introductionmentioning

confidence: 99%

Study of glow discharge positive column with cloud of disperse particles

et al. 2011

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Section: Introductionmentioning

confidence: 99%

Study of glow discharge positive column with cloud of disperse particles

et al. 2011

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“…11,12 In these experiments the presence of dust particles induces periodic changes in the discharge properties. Detailed kinetic simulations of the plasma with movable dust in pure argon 13 and for typical experimental conditions 14 were performed. The results of these simulations allowed us to explain the transition between capacitive and resistive modes of discharge glow in the beginning of the dust growth cycle.…”

Section: Introductionmentioning

confidence: 99%

Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/C2H2

Ariskin

Schweigert

Alexandrov

et al. 2009

Journal of Applied Physics

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We study the properties of a capacitive 13.56 MHz discharge with a mixture of Ar/ C 2 H 2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid model was developed to combine the kinetic description for electron motion and the fluid approach for negative and positive ion transports and plasmochemical processes. A significant change in plasma parameters related to injection of 5.8% portion of acetylene in argon was observed and analyzed. We found that the electronegativity of the mixture is about 30%. The densities of negatively and positively charged heavy hydrocarbons are sufficiently large to be precursors for the formation of nanoparticles in the discharge volume.

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“…Therefore, when analyzing the role of the dust component in the formation of the EEDF, the value of the electric field cannot be chosen arbitrarily, but should be chosen from the self-consistent solution. Such self-consistent calculations in the nonlocal approximation were carried out in the direct current (DC) [5,14] and RF discharges [15,16]. A comparison of these calculations with experimental results showed good agreement [5].…”

Section: Introductionmentioning

confidence: 97%

Features of the EEDF formation in the dusty plasma of the positive column of a glow discharge

Li¹,

Rabadanov²,

Bogdanov³

et al. 2021

Plasma Sources Sci. Technol.

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In this paper, the formation of the electron energy distribution function (EEDF) in the argon dusty plasma of the positive column of glow discharge at low pressure is investigated. A model for calculating EEDF in the local approximation is adapted to find the nonlocal EEDF via the Holstein–Tsendin model. The results show that, contrary to the prevalent opinion in the literature, the presence of dust has little effect on the EEDF up to the limiting values of the density of dust particles that can be injected into the plasma for the considered conditions. It is also shown that, when obtaining the nonlocal EEDF, the spatial profiles of the axial (heating) and radial (ambipolar) fields should be chosen from a self-consistent solution. Additionally, the differences between the local and nonlocal EEDFs increase in the peripheral regions of the discharge due to a sharp decrease of fast electrons in the nonlocal case. Significant changes in the form of the nonlocal EEDF along the radius also lead to noticeable changes in other characteristics of the electrons in this area, especially for those with a large energy threshold (e.g. due to excitation, ionization).

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Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge

Cited by 10 publications

References 11 publications

Study of glow discharge positive column with cloud of disperse particles

Study of glow discharge positive column with cloud of disperse particles

Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/C2H2

Features of the EEDF formation in the dusty plasma of the positive column of a glow discharge

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