Effect of the N2/(Ar+N2) ratio on mechanical properties of high entropy nitride (Cr0.35Al0.25Nb0.12Si0.08V0.20)Nx films

Lin, Yu-Chia; Hsu, Sheng-Yu; Lai, Yuan‐Tai; Kuo, Pei-Hung; Tsai, Su-Yueh

doi:10.1016/j.matchemphys.2021.125195

Cited by 13 publications

(3 citation statements)

References 27 publications

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“…The variations not only occur between similar coating systems, but also due to different deposition methods like cathodic vacuum arc deposition or magnetron sputtering processes. Indentation hardnesses range from 41 GPa, as reported by Huang et al for (AlCrNbSiTiV)N [23], to [8][9][10]13,16,17,[20][21][22][23][24]. The corresponding coating system is given in Table 1.…”

Section: Introductionmentioning

confidence: 95%

“…For all HEN systems, the deposition rates decrease with an increasing nitrogen flow ratio RN2 from zero due to target poisoning effects, which are commonly observed in magnetron sputtering techniques [25,26]. [8][9][10]13,16,17,[20][21][22][23][24]. The corresponding coating system is given in Table 1.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1. Deposition rate in terms of the dependence of the nitrogen flow ratio R N2 , derived from several references cited in the legend[8][9][10]13,16,17,[20][21][22][23][24]. The corresponding coating system is given in Table1.…”

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confidence: 99%

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The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Krülle,

Kuczyk,

Leonhardt

et al. 2024

Coatings

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In recent years, high-entropy alloys have attracted increasing scientific interest. Due to their promising combination of properties, such as high hardness and high temperature stability, they are attractive for use as tool coatings for machining applications, to give but one example. Previous studies often focused on layer deposition using magnetron sputtering. Comparatively little research has been carried out to date on coating deposition using direct current cathodic vacuum arc deposition (CAE), with higher achievable rates and almost completely ionized plasmas. The aim of this work is to investigate (HfNbTaTiZr)N-coatings produced by CAE. The nitrogen content was varied and the effects on the coating properties were investigated. Changing the N2/(N2 + Ar) ratio between 0.1 and 1.0 and varying the working pressure in the chamber from 2 Pa to 5 Pa resulted in variations of the nitrogen content of the coatings, ranging from 30 at% to 50 at%. Although different microstructures of the coatings were obtained, there was only a minor influence on the hardness and Young’s modulus.

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Section: Introductionmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

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The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Krülle,

Kuczyk,

Leonhardt

et al. 2024

Coatings

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Atomic Radius Mismatch: A Key Parameter for Design and Synthesis of High‐Entropy Physical Vapor Deposition Coatings—Review

Lotfi‐Khojasteh,

Elmkhah,

Nouri

et al. 2024

Adv Eng Mater

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High‐entropy metal sublattice coatings (HESCs) prepared by physical vapor deposition (PVD) have received attention due to their diverse range of properties and applications. One of the most critical requirements for their synthesis is the prediction and control of their wide‐spread properties, and several efforts have been undertaken using various thermodynamical parameters. The majority of these predictions concentrate on high‐entropy alloys (HEAs) while high‐entropy ceramics (HECs) received little attention. One of the most important parameters to control the structure and properties of HEAs is their atomic radius mismatch (δr), which we apply to crystalline, amorphous, and composite (amorphous matrix, crystalline matrix, and multilayer) HESCs. Based on the relationships between δr and structure, mixing enthalpy (ΔHmix), electronegativity difference (Δχ), ion bonding percentage (IBPHE), mechanical properties (including hardness, H, and Young’s modulus, E), and wear performance descriptors (H/E and H3/E2 ratios) we provide a δr‐based map to aid the design and selection of elements for HESCs.This article is protected by copyright. All rights reserved.

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Single‐Source Precursor Synthesis of a Compositionally Complex Early Transitional Metal Carbonitride (Ti,Zr,Hf,Nb,Ta)N_xC_1−x

Teppala,

Bernauer,

Rashid

et al. 2024

Adv Eng Mater

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Compositionally complex transitional metal nitrides are possible candidates for ultra‐high temperature usage and are known for their superior properties due to the high configuration entropy. It is often difficult to synthesize pure metal nitrides in bulk, due to significant oxygen contamination; hence, they are synthesized mainly as thin films through magnetron sputtering, CVD or surface nitridation of high entropy alloys. The present paper reports on a single‐phase compositionally complex ceramic, i.e., (Ti0.2Zr0.2Hf0.2Nb0.2Ta0.2)NxC1‐x, that was synthesized for the first time by employing an organometallic precursor route and using a double ammonolysis process. A multidisciplinary approach was performed to study these compositionally complex nitride and carbonitride systems, including experimental and theoretical investigations.This article is protected by copyright. All rights reserved.

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Effect of the N2/(Ar+N2) ratio on mechanical properties of high entropy nitride (Cr0.35Al0.25Nb0.12Si0.08V0.20)Nx films

Cited by 13 publications

References 27 publications

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Atomic Radius Mismatch: A Key Parameter for Design and Synthesis of High‐Entropy Physical Vapor Deposition Coatings—Review

Single‐Source Precursor Synthesis of a Compositionally Complex Early Transitional Metal Carbonitride (Ti,Zr,Hf,Nb,Ta)N_xC_1−x

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Effect of the N2/(Ar+N2) ratio on mechanical properties of high entropy nitride (Cr0.35Al0.25Nb0.12Si0.08V0.20)Nx films

Cited by 13 publications

References 27 publications

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Atomic Radius Mismatch: A Key Parameter for Design and Synthesis of High‐Entropy Physical Vapor Deposition Coatings—Review

Single‐Source Precursor Synthesis of a Compositionally Complex Early Transitional Metal Carbonitride (Ti,Zr,Hf,Nb,Ta)NxC1−x

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Single‐Source Precursor Synthesis of a Compositionally Complex Early Transitional Metal Carbonitride (Ti,Zr,Hf,Nb,Ta)N_xC_1−x