2022
DOI: 10.21203/rs.3.rs-2202621/v1
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Effect of the geometric structures of mask feature on the microstructure forming in through-mask electrochemical micromachining

Abstract: The manufacturing of surface microstructure is an important means for the modification of surface characteristics of parts. Through-mask electrochemical manufacturing is also an efficient way to fabricate surface microstructures. Nevertheless, in cases where the through-mask electrochemical manufacturing is used for the fabrication of microstructures, many experiments are required to control the cross-section morphology of the microstructures. Furthermore, there is a lack of quantitative analysis of the impact… Show more

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