Effect of the Gas Mixture Flow Rate on the Process of Diamond Synthesis From a High-Velocity Microwave Plasma

Ребров, А. К.; Emel’yanov, A. A.; Plotnikov, M. Yu.; Тимошенко, Н. И.; Терехов, В. И.; Yudin, I. B.

doi:10.1134/s002189442005017x

Cited by 7 publications

(8 citation statements)

References 9 publications

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“…To verify the developed algorithm, the temperatures of stagnation and mixture composition were calculated for the conditions of [22]. A good agreement was obtained between the our results and the data [22]. The developed algorithm was also used to calculate the composition of the mixture, providing a value of the stagnation temperature according to formula (1), close to that measured by the optical method.…”

Section: Methods For Evaluation Of the Mixture Compositionmentioning

confidence: 64%

“…In the modernized algorithm, molecule C 2 and seven reactions are added to the consideration: [30][31][32][33]. To verify the developed algorithm, the temperatures of stagnation and mixture composition were calculated for the conditions of [22]. A good agreement was obtained between the our results and the data [22].…”

Section: Methods For Evaluation Of the Mixture Compositionmentioning

confidence: 77%

“…The degree of hydrogen dissociation was determined from reference data [28] at equilibrium dissociation of hydrogen at a given temperature and pressure. In [22], a similar approach was used to calculate the stagnation temperature according to the formula ( 1), but for a mixture of hydrogen with methane and taking into account of the gas-phase methane decomposition in the mixture.…”

Section: Methods For Evaluation Of the Mixture Compositionmentioning

confidence: 99%

“…In [15,20,21], the features of microwave plasma formation in our configuration were studied by numerical methods. In [22,23], a numerical analysis of the flow of gas mixtures from the nozzle in the deposition chamber and their interaction with the substrate was performed. In [24,25], the results of a detailed study of the diamond structures deposited by the gas-jet method under different conditions are presented.…”

Section: Gas-jet Synthesis Of Diamond Structuresmentioning

confidence: 99%

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Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Emel’yanov¹,

Pinaev²,

Plotnikov³

et al. 2022

J. Phys. D: Appl. Phys.

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The paper describes synthesis of diamonds by the method of gas-jet deposition with microwave activation of precursor gases. This method involves the use of supersonic jet for delivering the components activated in the discharge chamber to the substrate located in the deposition chamber. A series of experiments was carried out with different amounts of methane supplied at a hydrogen flow rate of 8000 sccm. The obtained samples of diamond coatings were studied by scanning electron microscopy and Raman spectroscopy. The temperature of the mixture and the intensities of H, CH, and C2 lines in the plasma of the discharge chamber were measured by optical emission spectroscopy. The values of pressure and temperature in the discharge chamber were used to estimate the composition of the mixture. Thus, the numerical dependences of the molar concentrations of CH3, CH, C2 and C2H2 on the initial concentration of methane have been obtained. These dependences are in qualitative agreement with the dependences of the intensities of H, CH, and С2 lines. The numerical-experimental study performed allows us to conclude that the optimal value of methane concentration in the supplied mixture for the gas-jet deposition method in the considered range of parameters is about 1%.

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Section: Methods For Evaluation Of the Mixture Compositionmentioning

confidence: 64%

Section: Methods For Evaluation Of the Mixture Compositionmentioning

confidence: 77%

Section: Methods For Evaluation Of the Mixture Compositionmentioning

confidence: 99%

Section: Gas-jet Synthesis Of Diamond Structuresmentioning

confidence: 99%

See 2 more Smart Citations

Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Emel’yanov¹,

Pinaev²,

Plotnikov³

et al. 2022

J. Phys. D: Appl. Phys.

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“…In [6], the rate of diamond deposition by this method is 78 µm/h. In [7,8], a numerical analysis of flows of gas mixtures formed under conditions of gas-jet deposition is carried out. In [5,9], numerical methods are used to study methods of optimizing the process of microwave plasma formation in the considered configuration.…”

Section: Introductionmentioning

confidence: 99%

Effective cooling of substrates with low thermal conductivity under conditions of gas-jet MPCVD diamond synthesis

Emel’yanov

Plotnikov

Тимошенко

et al. 2021

J. Phys.: Conf. Ser.

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The paper presents the results of an experimental study of heating molybdenum and silicon substrates under the conditions of gas-jet deposition of diamond structures using the precursor gases of a microwave discharge to activate. A cooled substrate holder using a metal melt to improve heat removal by reducing the thermal resistance between the substrate and the substrate holder has been developed. The use of the melt allowed lowering the temperature of the silicon substrate under the conditions of gas-jet deposition to a level that ensures the preservation of its structure. The developed substrate holders were used to carry out gas-jet synthesis of diamond structures on molybdenum and silicon substrates.

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